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Oberkochen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method of operating a microlithographic projection apparatus and il...
Patent number
10,444,631
Issue date
Oct 15, 2019
Carl Zeiss SMT GmbH
Markus Deguenther
G02 - OPTICS
Information
Patent Grant
Method for operating an illumination system of a microlithographic...
Patent number
10,222,704
Issue date
Mar 5, 2019
Carl Zeiss SMT GmbH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system for microlithography
Patent number
10,088,754
Issue date
Oct 2, 2018
Carl Zeiss SMT GmbH
Axel Scholz
G02 - OPTICS
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,983,483
Issue date
May 29, 2018
Carl Zeiss SMT GmbH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,910,359
Issue date
Mar 6, 2018
Carl Zeiss SMT GmbH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system of a microlithographic projection exposure apparatus
Patent number
9,817,317
Issue date
Nov 14, 2017
Carl Zeiss SMT GmbH
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for compensating at least one defect of an opt...
Patent number
9,798,249
Issue date
Oct 24, 2017
Carl Zeiss SMT GmbH
Vladimir Dmitriev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical unit for projection lithography
Patent number
9,753,375
Issue date
Sep 5, 2017
Carl Zeiss SMT GmbH
Axel Scholz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measuring an optical symmetry property on a projection exposure app...
Patent number
9,703,205
Issue date
Jul 11, 2017
Carl Zeiss SMT GmbH
Jens Timo Neumann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for operating an illumination system of a microlithographic...
Patent number
9,703,206
Issue date
Jul 11, 2017
Carl Zeiss SMT GmbH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mirror system comprising at least one mirror for use for guiding il...
Patent number
9,665,008
Issue date
May 30, 2017
Carl Zeiss SMT GmbH
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Collector
Patent number
9,645,503
Issue date
May 9, 2017
Carl Zeiss SMT GmbH
Ingo Saenger
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Apparatus and method for compensating a defect of a channel of a mi...
Patent number
9,632,413
Issue date
Apr 25, 2017
Carl Zeiss SMT GmbH
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system for microlithography
Patent number
9,606,441
Issue date
Mar 28, 2017
Carl Zeiss SMT GmbH
Axel Scholz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of lithographically transferring a pattern on a light sensit...
Patent number
9,581,910
Issue date
Feb 28, 2017
Carl Zeiss SMT GmbH
Frank Schlesener
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system for an EUV lithography device and facet mirror...
Patent number
9,551,941
Issue date
Jan 24, 2017
Carl Zeiss SMT GmbH
Johannes Ruoff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical unit for projection lithography
Patent number
9,507,269
Issue date
Nov 29, 2016
Carl Zeiss SMT GmbH
Christoph Hennerkes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,500,954
Issue date
Nov 22, 2016
Carl Zeiss SMT GmbH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system of a microlithographic projection exposure apparatus...
Patent number
9,500,956
Issue date
Nov 22, 2016
Carl Zeiss SMT GmbH
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system for a microlithographic projection exposure apparatu...
Patent number
9,488,918
Issue date
Nov 8, 2016
Carl Zeiss SMT GmbH
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,477,157
Issue date
Oct 25, 2016
Carl Zeiss SMT GmbH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system for a microlithographic projection exposure apparatu...
Patent number
9,448,489
Issue date
Sep 20, 2016
Carl Zeiss SMT GmbH
Ingo Saenger
G02 - OPTICS
Information
Patent Grant
Optical system for a microlithographic projection exposure apparatu...
Patent number
9,442,385
Issue date
Sep 13, 2016
Carl Zeiss SMT GmbH
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Polarization-influencing optical arrangement, in particular in a mi...
Patent number
9,411,245
Issue date
Aug 9, 2016
Carl Zeiss SMT GmbH
Ingo Saenger
G02 - OPTICS
Information
Patent Grant
Method for operating an illumination system of a microlithographic...
Patent number
9,341,957
Issue date
May 17, 2016
Carl Zeiss SMT GmbH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,310,690
Issue date
Apr 12, 2016
Carl Zeiss SMT GmbH
Markus Deguenther
G02 - OPTICS
Information
Patent Grant
Illumination system for microlithography
Patent number
9,280,060
Issue date
Mar 8, 2016
Carl Zeiss SMT GmbH
Axel Scholz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for operating an illumination system of a microlithographic...
Patent number
9,217,931
Issue date
Dec 22, 2015
Carl Zeiss SMT GmbH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system of a microlithographic projection exposure apparatus
Patent number
9,182,677
Issue date
Nov 10, 2015
Carl Zeiss SMT GmbH
Frank Schlesener
G02 - OPTICS
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,046,786
Issue date
Jun 2, 2015
Carl Zeiss SMT GmbH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC...
Publication number
20190155166
Publication date
May 23, 2019
Carl Zeiss SMT GMBH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF OPERATING A MICROLITHOGRAPHIC PROJECTION APPARATUS AND IL...
Publication number
20180217506
Publication date
Aug 2, 2018
Carl Zeiss SMT GMBH
Markus Deguenther
G02 - OPTICS
Information
Patent Application
METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC...
Publication number
20180024439
Publication date
Jan 25, 2018
Carl Zeiss SMT GMBH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
Publication number
20170192361
Publication date
Jul 6, 2017
Carl Zeiss SMT GMBH
Axel Scholz
G02 - OPTICS
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20170038691
Publication date
Feb 9, 2017
Carl Zeiss SMT GMBH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC...
Publication number
20160246180
Publication date
Aug 25, 2016
Carl Zeiss SMT GMBH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20160209759
Publication date
Jul 21, 2016
Carl Zeiss SMT GMBH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
Publication number
20160161858
Publication date
Jun 9, 2016
Carl Zeiss SMT GMBH
Axel Scholz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC...
Publication number
20160077444
Publication date
Mar 17, 2016
Carl Zeiss SMT GMBH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM FOR AN EUV LITHOGRAPHY DEVICE AND FACET MIRROR...
Publication number
20160004164
Publication date
Jan 7, 2016
Carl Zeiss SMT GMBH
Johannes Ruoff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASURING AN OPTICAL SYMMETRY PROPERTY ON A PROJECTION EXPOSURE APP...
Publication number
20160004168
Publication date
Jan 7, 2016
Carl Zeiss SMT GMBH
Jens Timo NEUMANN
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF LITHOGRAPHICALLY TRANSFERRING A PATTERN ON A LIGHT SENSIT...
Publication number
20150301455
Publication date
Oct 22, 2015
Carl Zeiss SMT GMBH
Frank Schlesener
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20150234291
Publication date
Aug 20, 2015
Carl Zeiss SMT GMBH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...
Publication number
20150160566
Publication date
Jun 11, 2015
Carl Zeiss SMT GMBH
Ingo Saenger
G02 - OPTICS
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20150146184
Publication date
May 28, 2015
Carl Zeiss SMT GMBH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20150146183
Publication date
May 28, 2015
Carl Zeiss SMT GMBH
Markus Deguenther
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20150085272
Publication date
Mar 26, 2015
Carl Zeiss SMT GMBH
Ingo Saenger
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20150029480
Publication date
Jan 29, 2015
Carl Zeiss SMT GMBH
Frank Schlesener
G02 - OPTICS
Information
Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
Publication number
20150022798
Publication date
Jan 22, 2015
Carl Zeiss SMT GMBH
Axel Scholz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY
Publication number
20150015862
Publication date
Jan 15, 2015
Carl Zeiss SMT GMBH
Axel Scholz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR COMPENSATING A DEFECT OF A CHANNEL OF A MI...
Publication number
20150017589
Publication date
Jan 15, 2015
Carl Zeiss SMT GMBH
Ingo Saenger
G02 - OPTICS
Information
Patent Application
METHOD AND APPARATUS FOR COMPENSATING AT LEAST ONE DEFECT OF AN OPT...
Publication number
20140347646
Publication date
Nov 27, 2014
Vladimir Dmitriev
G02 - OPTICS
Information
Patent Application
POLARIZATION-INFLUENCING OPTICAL ARRANGEMENT, IN PARTICULAR IN A MI...
Publication number
20140313498
Publication date
Oct 23, 2014
Carl Zeiss SMT GMBH
Ingo Saenger
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...
Publication number
20140285788
Publication date
Sep 25, 2014
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MIRROR SYSTEM COMPRISING AT LEAST ONE MIRROR FOR USE FOR GUIDING IL...
Publication number
20140226142
Publication date
Aug 14, 2014
Ingo Saenger
G02 - OPTICS
Information
Patent Application
COLLECTOR
Publication number
20140192339
Publication date
Jul 10, 2014
Ingo Saenger
B82 - NANO-TECHNOLOGY
Information
Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS...
Publication number
20140132942
Publication date
May 15, 2014
Ingo Saenger
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY
Publication number
20140111785
Publication date
Apr 24, 2014
Christoph Hennerkes
G02 - OPTICS
Information
Patent Application
METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC...
Publication number
20130258303
Publication date
Oct 3, 2013
Carl Zeiss SMT GMBH
Oliver Natt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20130057844
Publication date
Mar 7, 2013
Carl Zeiss SMT GMBH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY