Frank Stietz

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Lauchheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device, EUV lithographic device and method for preventing and clean...
- Patent number 7,462,842
- Issue date Dec 9, 2008
- Carl Zeiss SMT AG
- Marco E. Wedowski
- B08 - CLEANING
Information Patent Grant
Optical element and method for its manufacture as well as lithograp...
- Patent number 7,172,788
- Issue date Feb 6, 2007
- Carl Zeiss SMT AG
- Andrey E. Yakshin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Device, EUV-lithographic device and method for preventing and clean...
- Patent number 7,060,993
- Issue date Jun 13, 2006
- Carl Zeiss SMT AG
- Marco E. Wedowski
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Device, EUV lithographic device and method for preventing and clean...
- Publication number 20060192158
- Publication date Aug 31, 2006
- Marco E. Wedowski
- B08 - CLEANING
Information Patent Application
Device, euv-lithographic device and method for preventing and clean...
- Publication number 20050104015
- Publication date May 19, 2005
- Marco Wedowski
- B08 - CLEANING
Information Patent Application
Method for producing radiation-resistant quartz glass material, and...
- Publication number 20040250572
- Publication date Dec 16, 2004
- Carl Zeiss SMT AG
- Ralf Lindner
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...