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Ottobrunn, DE
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last 30 patents
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Patent Grant
Method for multiple irradiation of a resist
Patent number
8,227,177
Issue date
Jul 24, 2012
Infineon Technologies AG
Kang-Hoon Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Method for Multiple Irradiation of a Resist
Publication number
20070264595
Publication date
Nov 15, 2007
Kang-Hoon Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY