Frank Tsai

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Saratoga, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for removal of immersion lithography medium in immersion lit...
- Patent number 7,741,012
- Issue date Jun 22, 2010
- Advanced Micro Devices, Inc.
- Adam R. Pawloski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for elimination of bubbles in immersion medium...
- Patent number 7,014,966
- Issue date Mar 21, 2006
- Advanced Micro Devices, Inc.
- Adam R. Pawloski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detector optics for electron beam inspection system
- Patent number 6,777,675
- Issue date Aug 17, 2004
- Multibeam
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for elimination of bubbles in immersion medium...
- Publication number 20050048223
- Publication date Mar 3, 2005
- Adam R. Pawloski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Detector optics for electron beam inspection system
- Publication number 20020153483
- Publication date Oct 24, 2002
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-beam multi-column electron beam inspection system
- Publication number 20020015143
- Publication date Feb 7, 2002
- Edward M. Yin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING