Frank Werfel

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Arzberg, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device for treating disc-like article and method for operating same
- Patent number 8,791,614
- Issue date Jul 29, 2014
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE FOR TREATING DISC-LIKE ARTICLE AND METHOD FOR OPERATING SAME
- Publication number 20110250044
- Publication date Oct 13, 2011
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS