Franklin D. Root

Follow

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
CMP apparatus and method
- Patent number 7,229,339
- Issue date Jun 12, 2007
- Novellus Systems, Inc.
- John F. Stumpf
- B24 - GRINDING POLISHING
Information Patent Grant
Arrangements for wafer polishing
- Patent number 6,309,279
- Issue date Oct 30, 2001
- SpeedFam-IPEC Corporation
- Mike L. Bowman
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CMP apparatus and method
- Publication number 20060003671
- Publication date Jan 5, 2006
- John F. Stumpf
- B24 - GRINDING POLISHING