Franklin Mark Schellenberg

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,886,123
- Issue date Jan 30, 2024
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,269,258
- Issue date Mar 8, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,884,340
- Issue date Jan 5, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,747,118
- Issue date Aug 18, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,539,880
- Issue date Jan 21, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Nanoscale pattern exposure system
- Patent number 10,191,385
- Issue date Jan 29, 2019
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for creating nanoscale patterns
- Patent number 9,891,536
- Issue date Feb 13, 2018
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Super-resolution exposure system
- Patent number 9,442,382
- Issue date Sep 13, 2016
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for writing nanoscale patterns
- Patent number 9,229,330
- Issue date Jan 5, 2016
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for nanopatterning
- Patent number 9,128,380
- Issue date Sep 8, 2015
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for nanolithography
- Patent number 8,841,637
- Issue date Sep 23, 2014
- Franklin Mark Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminating waveguide fabrication method
- Patent number 8,710,463
- Issue date Apr 29, 2014
- Franklin Mark Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminating waveguide fabrication method
- Patent number 8,507,880
- Issue date Aug 13, 2013
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Nanolithography system
- Patent number 8,507,881
- Issue date Aug 13, 2013
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illuminating waveguide fabrication method
- Patent number 8,193,519
- Issue date Jun 5, 2012
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Nanolithography system
- Patent number 7,989,783
- Issue date Aug 2, 2011
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Nanolithography system
- Patent number 7,586,583
- Issue date Sep 8, 2009
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of compensating for etch effects in photolithographic proces...
- Patent number 7,392,168
- Issue date Jun 24, 2008
- Yuri Granik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Creating photolithographic masks
- Patent number 7,174,531
- Issue date Feb 6, 2007
- Franklin M. Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chromeless phase mask layout generation
- Patent number 7,172,838
- Issue date Feb 6, 2007
- Wilhelm Maurer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Design-based reticle defect prioritization
- Patent number 6,778,695
- Issue date Aug 17, 2004
- Franklin M. Schellenberg
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for creating photolithographic masks
- Patent number 6,728,946
- Issue date Apr 27, 2004
- Franklin M. Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated device structure prediction based on model curvature
- Patent number 6,643,616
- Issue date Nov 4, 2003
- Yuri Granik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20240248407
- Publication date Jul 25, 2024
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20220197150
- Publication date Jun 23, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20210124273
- Publication date Apr 29, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200379356
- Publication date Dec 3, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200166850
- Publication date May 28, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20190155167
- Publication date May 23, 2019
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Application
NANOSCALE PATTERN EXPOSURE SYSTEM
- Publication number 20180173106
- Publication date Jun 21, 2018
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM FOR CREATING NANOSCALE PATTERNS
- Publication number 20160377987
- Publication date Dec 29, 2016
- Franklin Mark Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPER-RESOLUTION EXPOSURE SYSTEM
- Publication number 20160116846
- Publication date Apr 28, 2016
- Franklin Mark Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR WRITING NANOSCALE PATTERNS
- Publication number 20150198895
- Publication date Jul 16, 2015
- Franklin Mark Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOLITHOGRAPHY
- Publication number 20150042971
- Publication date Feb 12, 2015
- Franklin Mark Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATING WAVEGUIDE FABRICATION METHOD
- Publication number 20140116982
- Publication date May 1, 2014
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method For Nanolithography
- Publication number 20140055769
- Publication date Feb 27, 2014
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
Illuminating waveguide fabrication method
- Publication number 20120312774
- Publication date Dec 13, 2012
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
Nanolithography system
- Publication number 20120257183
- Publication date Oct 11, 2012
- Franklin Mark Schellenberg
- G02 - OPTICS
Information Patent Application
Nanolithography system
- Publication number 20100073657
- Publication date Mar 25, 2010
- Franklin Mark Schellenberg
- G02 - OPTICS
Information Patent Application
Illuminating waveguide fabrication method
- Publication number 20100075259
- Publication date Mar 25, 2010
- Franklin Mark Schellenberg
- G02 - OPTICS
Information Patent Application
Nanolithography system
- Publication number 20070125969
- Publication date Jun 7, 2007
- Franklin Mark Schellenberg
- G02 - OPTICS
Information Patent Application
Creating photolithographic masks
- Publication number 20040230937
- Publication date Nov 18, 2004
- Mentor Graphics Corporation
- Franklin M. Schellenberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Chromeless phase mask layout generation
- Publication number 20040063000
- Publication date Apr 1, 2004
- Mentor Graphics Corporation
- Wilhelm Maurer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of compensating for etch effects in photolithographic proces...
- Publication number 20020133801
- Publication date Sep 19, 2002
- Mentor Graphics Corporation
- Yuri Granik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Franklin Mark Schellenberg

Person

Patents Grantslast 30 patents

Method and system for nanoscale data recording

Method and system for nanoscale data recording

Method and system for nanoscale data recording

Method and system for nanoscale data recording

Method and system for nanoscale data recording

Nanoscale pattern exposure system

System for creating nanoscale patterns

Super-resolution exposure system

Method for writing nanoscale patterns

Method and system for nanopatterning

Method for nanolithography

Illuminating waveguide fabrication method

Illuminating waveguide fabrication method

Nanolithography system

Illuminating waveguide fabrication method

Nanolithography system

Nanolithography system

Method of compensating for etch effects in photolithographic proces...

Creating photolithographic masks

Chromeless phase mask layout generation

Design-based reticle defect prioritization

Method and apparatus for creating photolithographic masks

Integrated device structure prediction based on model curvature

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

NANOSCALE PATTERN EXPOSURE SYSTEM

SYSTEM FOR CREATING NANOSCALE PATTERNS

SUPER-RESOLUTION EXPOSURE SYSTEM

METHOD AND SYSTEM FOR WRITING NANOSCALE PATTERNS

METHOD AND SYSTEM FOR NANOLITHOGRAPHY

ILLUMINATING WAVEGUIDE FABRICATION METHOD

Method For Nanolithography

Illuminating waveguide fabrication method

Nanolithography system

Nanolithography system

Illuminating waveguide fabrication method

Nanolithography system

Creating photolithographic masks

Chromeless phase mask layout generation

Method of compensating for etch effects in photolithographic proces...