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Fransiscus M. Jacobs
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Vibration isolator, lithographic apparatus and device manufacturing...
Patent number
10,816,910
Issue date
Oct 27, 2020
ASML Netherlands B.V.
Hans Butler
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,503,086
Issue date
Dec 10, 2019
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, and device manufacturing method
Patent number
10,191,393
Issue date
Jan 29, 2019
ASML Netherlands B.V.
Jan Steven Christiaan Westerlaken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and displacemen...
Patent number
9,575,416
Issue date
Feb 21, 2017
ASML Netherlands B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with gas pressure means for controlling a pl...
Patent number
8,368,868
Issue date
Feb 5, 2013
ASML Netherlands B.V.
Johannes Petrus Martinus Bernardus Vermeulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,334,983
Issue date
Dec 18, 2012
ASML Netherlands B.V.
Ruud Antonius Catharina Maria Beerens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus provided with a swap bridge
Patent number
8,189,174
Issue date
May 29, 2012
ASML Netherlands B.V.
Matthias Kruizinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus
Patent number
6,721,035
Issue date
Apr 13, 2004
ASML Netherlands B.V.
Hubert M. Segers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate handler for use in lithographic projection apparatus
Patent number
6,404,483
Issue date
Jun 11, 2002
ASML Netherlands B.V.
Hubert M. Segers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical lithographic device having a machine frame with force compe...
Patent number
5,172,160
Issue date
Dec 15, 1992
U.S. Philips Corp.
Jan Van Eijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic device with a suspended object table
Patent number
5,150,153
Issue date
Sep 22, 1992
U.S. Philips Corp.
Dominicus J. Franken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
VIBRATION ISOLATOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
Publication number
20190049852
Publication date
Feb 14, 2019
ASML NETHERLANDS B.V.
Hans Butler
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190011838
Publication date
Jan 10, 2019
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
Publication number
20180059555
Publication date
Mar 1, 2018
ASML NETHERLANDS B.V.
Jan Steven Christiaan WESTERLAKEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DISPLACEMEN...
Publication number
20150212428
Publication date
Jul 30, 2015
ASML NETHERLANDS B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100297561
Publication date
Nov 25, 2010
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria BEERENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS WITH GAS PRESSURE MEANS FOR CONTROLLING A PL...
Publication number
20100159399
Publication date
Jun 24, 2010
ASML NETHERLANDS B.V.
Johannes Petrus Martinus Bernardus VERMEULEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS PROVIDED WITH A SWAP BRIDGE
Publication number
20100128241
Publication date
May 27, 2010
ASML NETHERLANDS B.V.
Matthias KRUIZINGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090168037
Publication date
Jul 2, 2009
ASML NETHERLANDS B.V.
Roger Johannes Maria Hubertus Kroonen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090168042
Publication date
Jul 2, 2009
ASML NETHERLANDS B.V.
Roger Johannes Maria Hubertus Kroonen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY