FRANZ KUMNIG

Person

LIESERBRUCKE, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 11,195,730
- Issue date Dec 7, 2021
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,490,426
- Issue date Nov 26, 2019
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating surfaces of wafer-shaped articles and gripping...
- Patent number 9,633,890
- Issue date Apr 25, 2017
- Lam Research AG
- Ulrich Tschinderle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating disc-like articles
- Patent number 8,833,380
- Issue date Sep 16, 2014
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for treating a semiconductor wafer
- Patent number 8,668,777
- Issue date Mar 11, 2014
- Lam Research AG
- Harald Okorn-Schmidt
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Device for holding wafer shaped articles
- Patent number 8,646,767
- Issue date Feb 11, 2014
- Lam Research AG
- Franz Kumnig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating disc-like articles
- Patent number 8,490,634
- Issue date Jul 23, 2013
- Lam Research AG
- Rainer Obweger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20200090956
- Publication date Mar 19, 2020
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20160064242
- Publication date Mar 3, 2016
- LAM RESEARCH AG
- Rainer OBWEGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20130233356
- Publication date Sep 12, 2013
- LAM RESEARCH AG
- Rainer OBWEGER
- B08 - CLEANING
Information Patent Application
DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES AND GRIPPING...
- Publication number 20130154203
- Publication date Jun 20, 2013
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR TREATING A SEMICONDUCTOR WAFER
- Publication number 20120160276
- Publication date Jun 28, 2012
- LAM RESEARCH AG
- Harald OKORN-SCHMIDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...
- Publication number 20120138097
- Publication date Jun 7, 2012
- LAM RESEARCH AG
- Harald OKORN-SCHMIDT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR HOLDING WAFER SHAPED ARTICLES
- Publication number 20120018940
- Publication date Jan 26, 2012
- LAM RESEARCH AG
- FRANZ KUMNIG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING DISC-LIKE ARTICLES
- Publication number 20110304107
- Publication date Dec 15, 2011
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING DISC-LIKE ARTICLES
- Publication number 20110253181
- Publication date Oct 20, 2011
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS

FRANZ KUMNIG

Person

Patents Grantslast 30 patents

Method and apparatus for processing wafer-shaped articles

Method and apparatus for processing wafer-shaped articles

Device for treating surfaces of wafer-shaped articles and gripping...

Device for treating disc-like articles

Process for treating a semiconductor wafer

Device for holding wafer shaped articles

Device for treating disc-like articles

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES AND GRIPPING...

PROCESS FOR TREATING A SEMICONDUCTOR WAFER

METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...

DEVICE FOR HOLDING WAFER SHAPED ARTICLES

DEVICE FOR TREATING DISC-LIKE ARTICLES

DEVICE FOR TREATING DISC-LIKE ARTICLES