Franz Sorg

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical assembly having a thermally conductive component
- Patent number 11,194,119
- Issue date Dec 7, 2021
- Carl Zeiss SMT GmbH
- Julian Kaller
- G02 - OPTICS
Information Patent Grant
Method and device for the correction of imaging defects
- Patent number 11,003,088
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for the correction of imaging defects
- Patent number 10,620,543
- Issue date Apr 14, 2020
- Carl Zeiss SMT GmbH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical assembly having a thermally conductive component
- Patent number 10,509,336
- Issue date Dec 17, 2019
- Carl Zeiss SMT GmbH
- Julian Kaller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus and measuring devic...
- Patent number 10,345,710
- Issue date Jul 9, 2019
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical module for a microlithography objective holding optical ele...
- Patent number 10,197,925
- Issue date Feb 5, 2019
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Optical module for a microlithography objective holding optical ele...
- Patent number 9,977,228
- Issue date May 22, 2018
- Carl Zeiss SMT GmbH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and measuring device for a projection lens
- Patent number 9,436,095
- Issue date Sep 6, 2016
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Replacement apparatus for an optical element
- Patent number 9,081,296
- Issue date Jul 14, 2015
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Replacement apparatus for an optical element
- Patent number 8,902,519
- Issue date Dec 2, 2014
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Optical module for a microlithography objective including holding a...
- Patent number 8,711,331
- Issue date Apr 29, 2014
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,659,745
- Issue date Feb 25, 2014
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Device for the low-deformation replaceable mounting of an optical e...
- Patent number 8,582,081
- Issue date Nov 12, 2013
- Carl Zeiss SMT GmbH
- Franz Sorg
- G02 - OPTICS
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,542,346
- Issue date Sep 24, 2013
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Replacement apparatus for an optical element
- Patent number 8,488,261
- Issue date Jul 16, 2013
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Projection objective with diaphragms
- Patent number 8,488,104
- Issue date Jul 16, 2013
- Carl Zeiss SMT GmbH
- Nils Dieckmann
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and measuring device for a projection lens
- Patent number 8,330,935
- Issue date Dec 11, 2012
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for the correction of imaging defects
- Patent number 8,159,648
- Issue date Apr 17, 2012
- Carl Zeiss SMT GmbH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Replacement apparatus for an optical element
- Patent number 7,995,296
- Issue date Aug 9, 2011
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Replacement apparatus for an optical element
- Patent number 7,768,723
- Issue date Aug 3, 2010
- Carl Zeiss SMT AG
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Reflecting optical element with eccentric optical passageway
- Patent number 7,760,327
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Hans-Jürgen Scherle
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, device manufacturing method and exchangeabl...
- Patent number 7,724,351
- Issue date May 25, 2010
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element
- Patent number 7,529,046
- Issue date May 5, 2009
- Carl Zeiss SMT AG
- Thomas Schletterer
- G02 - OPTICS
Information Patent Grant
Replacement apparatus for an optical element
- Patent number 7,515,363
- Issue date Apr 7, 2009
- Carl Zeiss SMT AG
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Device for the low-deformation replaceable mounting of an optical e...
- Patent number 7,471,469
- Issue date Dec 30, 2008
- Carl Zeiss SMT AG
- Franz Sorg
- G02 - OPTICS
Information Patent Grant
Replacement apparatus for an optical element
- Patent number 7,265,917
- Issue date Sep 4, 2007
- Carl Zeiss SMT AG
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
System for damping oscillations
- Patent number 6,897,599
- Issue date May 24, 2005
- Carl Zeiss SMT AG
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical element deformation system
- Patent number 6,844,994
- Issue date Jan 18, 2005
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Oscillation damping system
- Patent number 6,700,715
- Issue date Mar 2, 2004
- Carl Zeiss SMT AG
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Device for the low-deformation support of an optical element and me...
- Patent number 6,441,975
- Issue date Aug 27, 2002
- Carl-Zeiss-Stiftung
- Michael Ebert
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20200233314
- Publication date Jul 23, 2020
- Carl Zeiss SMT GMBH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY HAVING A THERMALLY CONDUCTIVE COMPONENT
- Publication number 20200103771
- Publication date Apr 2, 2020
- Carl Zeiss SMT GMBH
- Julian Kaller
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20190302627
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING OPTICAL ELE...
- Publication number 20180373007
- Publication date Dec 27, 2018
- Carl Zeiss SMT GMBH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY HAVING A THERMALLY CONDUCTIVE COMPONENT
- Publication number 20170261867
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Julian Kaller
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20170082930
- Publication date Mar 23, 2017
- Carl Zeiss SMT GMBH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
- Publication number 20160041475
- Publication date Feb 11, 2016
- Carl Zeiss SMT GMBH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20160026094
- Publication date Jan 28, 2016
- Carl Zeiss SMT GMBH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
- Publication number 20150070789
- Publication date Mar 12, 2015
- Carl Zeiss SMT GMBH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING AND SUPPORT...
- Publication number 20140268381
- Publication date Sep 18, 2014
- Carl Zeiss SMT GMBH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
OPTICAL MODULE FOR AN OBJECTIVE
- Publication number 20140254036
- Publication date Sep 11, 2014
- Carl Zeiss SMT GMBH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...
- Publication number 20140063628
- Publication date Mar 6, 2014
- Carl Zeiss SMT GMBH
- Franz Sorg
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20130278911
- Publication date Oct 24, 2013
- Guido Limbach
- G02 - OPTICS
Information Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
- Publication number 20130279029
- Publication date Oct 24, 2013
- Jens Kugler
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
- Publication number 20130120723
- Publication date May 16, 2013
- Carl Zeiss SMT GMBH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20120176591
- Publication date Jul 12, 2012
- Carl Zeiss SMT GMBH
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE WITH DIAPHRAGMS
- Publication number 20110285979
- Publication date Nov 24, 2011
- Carl Zeiss SMT GMBH
- Nils Dieckmann
- G02 - OPTICS
Information Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
- Publication number 20110255181
- Publication date Oct 20, 2011
- Carl Zeiss SMT GMBH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
- Publication number 20100271716
- Publication date Oct 28, 2010
- Carl Zeiss SMT AG
- Jens Kugler
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
- Publication number 20100141912
- Publication date Jun 10, 2010
- Carl Zeiss SMT AG
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20090244509
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Guido Limbach
- G02 - OPTICS
Information Patent Application
Replacement Apparatus for an Optical Element
- Publication number 20090168207
- Publication date Jul 2, 2009
- Carl Zeiss SMT AG
- Jens Kugler
- G02 - OPTICS
Information Patent Application
DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...
- Publication number 20090122288
- Publication date May 14, 2009
- Carl Zeiss SMT AG
- Franz Sorg
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS
- Publication number 20080316444
- Publication date Dec 25, 2008
- Carl Zeiss SMT AG
- Franz Sorg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20080309894
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Module for an Objective
- Publication number 20080198352
- Publication date Aug 21, 2008
- Carl Zeiss SMT AG
- Jens Kugler
- G02 - OPTICS
Information Patent Application
Replacement apparatus for an optical element
- Publication number 20070297074
- Publication date Dec 27, 2007
- Jens Kugler
- G02 - OPTICS
Information Patent Application
Optical Element
- Publication number 20070201151
- Publication date Aug 30, 2007
- Thomas Schletterer
- G02 - OPTICS
Information Patent Application
Lithographic apparatus, device manufacturing method and exchangeabl...
- Publication number 20070177122
- Publication date Aug 2, 2007
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20070070316
- Publication date Mar 29, 2007
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Optical assembly having a thermally conductive component

Method and device for the correction of imaging defects

Method and device for the correction of imaging defects

Optical assembly having a thermally conductive component

Microlithographic projection exposure apparatus and measuring devic...

Optical module for a microlithography objective holding optical ele...

Optical module for a microlithography objective holding optical ele...

Exposure apparatus and measuring device for a projection lens

Replacement apparatus for an optical element

Replacement apparatus for an optical element

Optical module for a microlithography objective including holding a...

Optical system with an exchangeable, manipulable correction arrange...

Device for the low-deformation replaceable mounting of an optical e...

Optical system with an exchangeable, manipulable correction arrange...

Replacement apparatus for an optical element

Projection objective with diaphragms

Exposure apparatus and measuring device for a projection lens

Method and device for the correction of imaging defects

Replacement apparatus for an optical element

Replacement apparatus for an optical element

Reflecting optical element with eccentric optical passageway

Lithographic apparatus, device manufacturing method and exchangeabl...

Optical element

Replacement apparatus for an optical element

Device for the low-deformation replaceable mounting of an optical e...

Replacement apparatus for an optical element

System for damping oscillations

Optical element deformation system

Oscillation damping system

Device for the low-deformation support of an optical element and me...

Patents Applicationslast 30 patents

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

OPTICAL ASSEMBLY HAVING A THERMALLY CONDUCTIVE COMPONENT

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING OPTICAL ELE...

OPTICAL ASSEMBLY HAVING A THERMALLY CONDUCTIVE COMPONENT

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT

OPTICAL MODULE FOR A MICROLITHOGRAPHY OBJECTIVE HOLDING AND SUPPORT...

OPTICAL MODULE FOR AN OBJECTIVE

DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT

EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

PROJECTION OBJECTIVE WITH DIAPHRAGMS

REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT

REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT

EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

Replacement Apparatus for an Optical Element

DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...

METHOD AND DEVICE FOR THE CORRECTION OF IMAGING DEFECTS

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

Optical Module for an Objective

Replacement apparatus for an optical element

Optical Element

Lithographic apparatus, device manufacturing method and exchangeabl...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...