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Franz Sumnitsch
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Klagenfurt, AT
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last 30 patents
Information
Patent Grant
Device for discharging two or more media with media nozzles
Patent number
6,383,331
Issue date
May 7, 2002
SEZ Semiconductor-Equipment Zubehor fur die Halbeiterfertigung AG
Franz Sumnitsch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process and device for handling disk-like objects, especially silic...
Patent number
6,316,367
Issue date
Nov 13, 2001
SEZ Semiconductor-Equipment Zubehor
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrangement for treatment of wafer-shaped articles, particularly si...
Patent number
6,193,798
Issue date
Feb 27, 2001
SEZ Semiconductor-Equipment Zubehor fur die Halbleitertertigung AG
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for wet etching of semiconductor wafers
Patent number
6,162,739
Issue date
Dec 19, 2000
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for preventing dripping from conduit openings
Patent number
6,056,208
Issue date
May 2, 2000
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Willibald Pirker
B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...
Information
Patent Grant
Rotary chuck including pins for lifting wafers
Patent number
6,056,825
Issue date
May 2, 2000
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support for wafer-shaped objects, in particular silicon wafers
Patent number
6,022,417
Issue date
Feb 8, 2000
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for treatment of wafer-shaped articles, especially silicon w...
Patent number
5,845,662
Issue date
Dec 8, 1998
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gripper for disk-shaped articles
Patent number
5,762,391
Issue date
Jun 9, 1998
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung Gesellschaft...
Franz Sumnitsch
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Support for disk-shaped articles
Patent number
5,513,668
Issue date
May 7, 1996
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung Gesellschaft...
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support for disk-shaped articles using the Bernoulli principle
Patent number
5,492,566
Issue date
Feb 20, 1996
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support for slice-shaped articles and device for etching silicon wa...
Patent number
4,903,717
Issue date
Feb 27, 1990
Sez Semiconductor-Equipment Zubehoer Fuer die Halbleiterfertigung Gesellschaf...
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS