Fred Bijkerk

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Bosch En Duin, NL

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Patents Grantslast 30 patents

Information Patent Grant
Reflective optical element for EUV lithography device
- Patent number 8,144,830
- Issue date Mar 27, 2012
- Carl Zeiss GmbH
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY DEVICE
- Publication number 20100027107
- Publication date Feb 4, 2010
- Carl Zeiss SMT AG
- Andrey E. Yakshin
- B82 - NANO-TECHNOLOGY