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Fred C. Redecker
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Fremont, CA, US
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last 30 patents
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Patent Grant
Method and apparatus to decouple power and cavitation for megasonic...
Patent number
7,165,563
Issue date
Jan 23, 2007
Lam Research Corporation
John M. Boyd
B08 - CLEANING
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Patent Grant
Wafer bevel edge cleaning system and apparatus
Patent number
6,910,240
Issue date
Jun 28, 2005
Lam Research Corporation
John M. Boyd
G11 - INFORMATION STORAGE
Patents Applications
last 30 patents
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Patent Application
Method and Apparatus for Semiconductor Wafer Cleaning Using High-Fr...
Publication number
20070119477
Publication date
May 31, 2007
LAM RESEARCH CORPORATION
Fred C. Redecker
B08 - CLEANING
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Patent Application
BARRIER LAYER BUFFING AFTER CU CMP
Publication number
20010055880
Publication date
Dec 27, 2001
SHIJIAN LI
H01 - BASIC ELECTRIC ELEMENTS