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Fred D. Egley
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Power and data transmission to substrate support in plasma chambers...
Patent number
11,901,944
Issue date
Feb 13, 2024
Lam Research Corporation
Changyou Jing
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Virtual metrology method for ESC temperature estimation using therm...
Patent number
10,509,425
Issue date
Dec 17, 2019
Lam Research Corporation
Tao Zhang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing system printed-circuit control board assembly...
Patent number
10,306,776
Issue date
May 28, 2019
Lam Research Corporation
Eric Pape
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multichannel thermocouple compensation for three dimensional temper...
Patent number
10,119,867
Issue date
Nov 6, 2018
Lam Research Corporation
Fred Dennis Egley
G01 - MEASURING TESTING
Information
Patent Grant
Multichannel thermocouple compensation for three dimensional temper...
Patent number
9,279,731
Issue date
Mar 8, 2016
Lam Research Corporation
Fred Dennis Egley
G01 - MEASURING TESTING
Information
Patent Grant
Direct drive arrangement to control confinement rings positioning a...
Patent number
8,992,722
Issue date
Mar 31, 2015
Lam Research Corporation
John W. Rasnick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bare aluminum baffles for resist stripping chambers
Patent number
8,859,432
Issue date
Oct 14, 2014
Lam Research Corporation
Fred D. Egley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Automated bubble detection apparatus and method
Patent number
8,854,451
Issue date
Oct 7, 2014
Lam Research Corporation
Josh Cormier
G01 - MEASURING TESTING
Information
Patent Grant
Radio frequency (RF) power filters and plasma processing systems in...
Patent number
8,742,666
Issue date
Jun 3, 2014
Lam Research Corporation
Maolin Long
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
UV lamp assembly of degas chamber having rotary shutters
Patent number
8,584,612
Issue date
Nov 19, 2013
Lam Research Corporation
William T. Hart
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bare aluminum baffles for resist stripping chambers
Patent number
8,313,635
Issue date
Nov 20, 2012
Lam Research Corporation
Fred D. Egley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Bare aluminum baffles for resist stripping chambers
Patent number
7,811,409
Issue date
Oct 12, 2010
Lam Research Corporation
Fred D. Egley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
POWER AND DATA TRANSMISSION TO SUBSTRATE SUPPORT IN PLASMA CHAMBERS...
Publication number
20220247492
Publication date
Aug 4, 2022
LAM RESEARCH CORPORATION
Changyou JING
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM PRINTED-CIRCUIT CONTROL BOARD ASSEMBLY...
Publication number
20190166700
Publication date
May 30, 2019
LAM RESEARCH CORPORATION
Eric Pape
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VIRTUAL METROLOGY METHOD FOR ESC TEMPERATURE ESTIMATION USING THERM...
Publication number
20180210473
Publication date
Jul 26, 2018
LAM RESEARCH CORPORATION
Tao Zhang
G05 - CONTROLLING REGULATING
Information
Patent Application
MULTICHANNEL THERMOCOUPLE COMPENSATION FOR THREE DIMENSIONAL TEMPER...
Publication number
20160161342
Publication date
Jun 9, 2016
LAM RESEARCH CORPORATION
Fred Dennis Egley
G01 - MEASURING TESTING
Information
Patent Application
MULTICHANNEL THERMOCOUPLE COMPENSATION FOR THREE DIMENSIONAL TEMPER...
Publication number
20140269821
Publication date
Sep 18, 2014
LAM RESEARCH CORPORATION
Fred Dennis Egley
G01 - MEASURING TESTING
Information
Patent Application
AUTOMATED BUBBLE DETECTION APPARATUS AND METHOD
Publication number
20130100278
Publication date
Apr 25, 2013
LAM RESEARCH CORPORATION
Josh Cormier
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS
Publication number
20130056022
Publication date
Mar 7, 2013
LAM RESEARCH CORPORATION
Fred D. Egley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RADIO FREQUENCY (RF) POWER FILTERS AND PLASMA PROCESSING SYSTEMS IN...
Publication number
20120032756
Publication date
Feb 9, 2012
Maolin LONG
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
UV LAMP ASSEMBLY OF DEGAS CHAMBER HAVING ROTARY SHUTTERS
Publication number
20110146705
Publication date
Jun 23, 2011
LAM RESEARCH CORPORATION
William T. Hart
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECT DRIVE ARRANGEMENT TO CONTROL CONFINEMENT RINGS POSITIONING A...
Publication number
20110054661
Publication date
Mar 3, 2011
JOHN W. RASNICK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS
Publication number
20100319813
Publication date
Dec 23, 2010
LAM RESEARCH CORPORATION
Fred D. Egley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Bare aluminum baffles for resist stripping chambers
Publication number
20080178906
Publication date
Jul 31, 2008
Lam Research Corporation
Fred D. Egley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Bare aluminum baffles for resist stripping chambers
Publication number
20050284573
Publication date
Dec 29, 2005
Fred D. Egley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...