Membership
Tour
Register
Log in
Frederick A. Palenschat
Follow
Person
San Diego, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
6 KHz and above gas discharge laser system
Patent number
8,855,166
Issue date
Oct 7, 2014
Cymer, LLC
Richard C. Ujazdowski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High repetition rate laser produced plasma EUV light source
Patent number
7,087,914
Issue date
Aug 8, 2006
Cymer, Inc.
Robert P. Akins
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Six to ten KHz, or greater gas discharge laser system
Patent number
6,914,919
Issue date
Jul 5, 2005
Cymer, Inc.
Tom A. Watson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser wavelength control unit with piezoelectric driver
Patent number
6,650,666
Issue date
Nov 18, 2003
Cymer, Inc.
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser wavelength control unit with piezoelectric driver
Patent number
6,532,247
Issue date
Mar 11, 2003
Cymer, Inc.
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM
Publication number
20120120974
Publication date
May 17, 2012
Richard C. Ujazdowski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High repetition rate laser produced plasma EUV light source
Publication number
20080197297
Publication date
Aug 21, 2008
Robert P. Akins
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
6 Khz and above gas discharge laser system
Publication number
20060222034
Publication date
Oct 5, 2006
Cymer, Inc.
Richard C. Ujazdowski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High repetition rate laser produced plasma EUV light source
Publication number
20050205810
Publication date
Sep 22, 2005
Robert P. Akins
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Discharge produced plasma EUV light source
Publication number
20040160155
Publication date
Aug 19, 2004
William N. Partlo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Six to ten KHz, or greater gas discharge laser system
Publication number
20030012234
Publication date
Jan 16, 2003
Tom A. Watson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser wavelength control unit with piezoelectric driver
Publication number
20020154669
Publication date
Oct 24, 2002
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser wavelength control unit with piezoelectric driver
Publication number
20020006149
Publication date
Jan 17, 2002
Ronald L. Spangler
H01 - BASIC ELECTRIC ELEMENTS