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Frederick Kubick
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Redding, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and method for illumination uniformity corre...
Patent number
8,629,973
Issue date
Jan 14, 2014
ASML Holding N.V.
Richard Carl Zimmerman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic Apparatus and Method for Illumination Uniformity Corre...
Publication number
20100302525
Publication date
Dec 2, 2010
ASML Holding N.V.
Richard Carl ZIMMERMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY