Frederick T. Turner

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum-processing chamber-shield and multi-chamber pumping method
- Patent number 7,001,491
- Issue date Feb 21, 2006
- Tokyo Electron Limited
- Michael J. Lombardi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamp with wafer release for semiconductor wafer processing equipment
- Patent number 5,605,866
- Issue date Feb 25, 1997
- Varian Associates, Inc.
- Adolphus E. McClanahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamp with wafer release for semiconductor wafer processing equipment
- Patent number 5,513,594
- Issue date May 7, 1996
- Adolphus E. McClanahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer coating system
- Patent number 5,281,320
- Issue date Jan 25, 1994
- Varian Associates Inc.
- Frederick T. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer coating system
- Patent number 5,024,747
- Issue date Jun 18, 1991
- Varian Associates, Inc.
- Frederick T. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular wafer transport and processing system
- Patent number 4,917,556
- Issue date Apr 17, 1990
- Varian Associates, Inc.
- Lawrence R. Stark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer coating system
- Patent number 4,756,815
- Issue date Jul 12, 1988
- Varian Associates, Inc.
- Frederick T. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Blocking shield and method for contouring the thickness of sputter...
- Patent number 4,436,602
- Issue date Mar 13, 1984
- Varian Associates, Inc.
- David J. Harra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter system incorporating an improved blocking shield for contou...
- Patent number 4,416,759
- Issue date Nov 22, 1983
- Varian Associates, Inc.
- David J. Harra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for asymmetrically contouring the thickness of sputter co...
- Patent number 4,416,760
- Issue date Nov 22, 1983
- Varian Associates, Inc.
- Frederick T. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency etch table with biased extension member
- Patent number 4,392,938
- Issue date Jul 12, 1983
- Varian Associates, Inc.
- David J. Harra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter-coating system, and vaccuum valve, transport, and sputter s...
- Patent number 4,313,815
- Issue date Feb 2, 1982
- Varian Associates, Inc.
- Walter E. Graves
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition rate regulation by computer control of sputtering systems
- Patent number 4,166,783
- Issue date Sep 4, 1979
- Varian Associates, Inc.
- Frederick T. Turner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Vacuum-processing chamber-shield and multi-chamber pumping method
- Publication number 20060037537
- Publication date Feb 23, 2006
- TOKYO ELECTRON LIMITED
- Michael J. Lombardi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum-processing chamber-shield and multi-chamber pumping method
- Publication number 20040262155
- Publication date Dec 30, 2004
- TOKYO ELECTRON LIMITED
- Michael J. Lombardi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Frederick T. Turner

Person

Patents Grantslast 30 patents

Vacuum-processing chamber-shield and multi-chamber pumping method

Clamp with wafer release for semiconductor wafer processing equipment

Clamp with wafer release for semiconductor wafer processing equipment

Wafer coating system

Wafer coating system

Modular wafer transport and processing system

Wafer coating system

Blocking shield and method for contouring the thickness of sputter...

Sputter system incorporating an improved blocking shield for contou...

Apparatus for asymmetrically contouring the thickness of sputter co...

Radio frequency etch table with biased extension member

Sputter-coating system, and vaccuum valve, transport, and sputter s...

Deposition rate regulation by computer control of sputtering systems

Patents Applicationslast 30 patents

Vacuum-processing chamber-shield and multi-chamber pumping method

Vacuum-processing chamber-shield and multi-chamber pumping method