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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for determining overlay
Patent number
11,774,869
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Ruud Hendrikus Martinus Johannes Bloks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for decision making in a semiconductor manufacturing process
Patent number
11,687,007
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Arnaud Hubaux
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
11,378,893
Issue date
Jul 5, 2022
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,838,310
Issue date
Nov 17, 2020
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,254,663
Issue date
Apr 9, 2019
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,268,242
Issue date
Feb 23, 2016
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,188,880
Issue date
Nov 17, 2015
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,913,228
Issue date
Dec 16, 2014
ASML Netherlands B.V.
Maurice Wijckmans
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,514,365
Issue date
Aug 20, 2013
ASML Netherlands B.V.
Frederik Eduard De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, stage apparatus and device manufacturing me...
Patent number
8,384,881
Issue date
Feb 26, 2013
ASML Netherlands B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,264,671
Issue date
Sep 11, 2012
ASML Netherlands B.V.
Igor Matheus Petronella Aarts
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method having liqui...
Patent number
7,804,575
Issue date
Sep 28, 2010
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and method of c...
Patent number
7,746,447
Issue date
Jun 29, 2010
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and arrangement for predicting thermally-induced deformation...
Patent number
7,710,539
Issue date
May 4, 2010
ASML Netherlands B.V.
Boris Menchtchikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and arrangement for correcting thermally-induced field defor...
Patent number
7,710,538
Issue date
May 4, 2010
ASML Netherlands B.V.
Boris Menchtchikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and arrangement for correcting thermally-induced field defor...
Patent number
7,462,429
Issue date
Dec 9, 2008
ASML Netherlands B.V.
Boris Menchtchikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and arrangement for predicting thermally-induced deformation...
Patent number
7,462,430
Issue date
Dec 9, 2008
ASML Netherlands B.V.
Boris Menchtchikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of calibrating a lithographic apparatus and device manufactu...
Patent number
7,426,011
Issue date
Sep 16, 2008
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
7,423,725
Issue date
Sep 9, 2008
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,196,768
Issue date
Mar 27, 2007
ASML Netherlands B.V.
Joost Jeroen Ottens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electronic flash unit
Patent number
4,492,451
Issue date
Jan 8, 1985
U.S. Philips Corporation
Egbertus J. P. Maassen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD AND ARRANGEMENT FOR DETERMINING THERMALLY-INDUCED DEFORMATIONS
Publication number
20240280907
Publication date
Aug 22, 2024
ASML Netherlands B.V.
Hasret ERCISLI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20230333482
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
A METHOD AND SYSTEM FOR DETERMINING OVERLAY
Publication number
20220171299
Publication date
Jun 2, 2022
ASML NETHERLANDS B.V.
Ruud Hendrikus Martinus Johannes BLOKS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20220082949
Publication date
Mar 17, 2022
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G05 - CONTROLLING REGULATING
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20210063898
Publication date
Mar 4, 2021
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DETERMINING PELLICLE DEGRADATION COMPENSATION CORRECTIONS...
Publication number
20190384164
Publication date
Dec 19, 2019
ASML NETHERLANDS B.V.
Marcel Theodorus Maria VAN KESSEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20190235397
Publication date
Aug 1, 2019
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20160048085
Publication date
Feb 18, 2016
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120113402
Publication date
May 10, 2012
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100321650
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
THEODORUS PETRUS MARIA CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090323037
Publication date
Dec 31, 2009
ASML NETHERLANDS B.V.
Igor Matheus Petronella AARTS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, STAGE APPARATUS AND DEVICE MANUFACTURING ME...
Publication number
20090086180
Publication date
Apr 2, 2009
ASML NETHERLANDS B.V.
Joost Jeroen OTTENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND ARRANGEMENT FOR PREDICTING THERMALLY-INDUCED DEFORMATIO...
Publication number
20090055115
Publication date
Feb 26, 2009
ASML NETHERLANDS B.V.
Boris MENCHTCHIKOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND ARRANGEMENT FOR CORRECTING THERMALLY-INDUCED FIELD DEFOR...
Publication number
20090055114
Publication date
Feb 26, 2009
ASML NETHERLANDS B.V.
Boris MENCHTCHIKOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070242245
Publication date
Oct 18, 2007
ASML NETHERLANDS B.V.
Maurice Wijckmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and method of c...
Publication number
20070146664
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and arrangement for predicting thermally-induced deformation...
Publication number
20070090853
Publication date
Apr 26, 2007
ASML NETHERLANDS B.V.
Boris Menchtchikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and arrangement for correcting thermally-induced field defor...
Publication number
20070082280
Publication date
Apr 12, 2007
ASML NETHERLANDS B.V.
Boris Menchtchikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of calibrating a lithographic apparatus and device manufactu...
Publication number
20070058152
Publication date
Mar 15, 2007
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic method
Publication number
20070052940
Publication date
Mar 8, 2007
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060087637
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060033898
Publication date
Feb 16, 2006
ASML NETHERLANDS B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY