Fredrik Sjostrom

Person

Taby, SE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for overlay compensation between subsequently...
- Patent number 8,137,875
- Issue date Mar 20, 2012
- Micronic Mydata AB
- Fredrik Sjöström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for a multiple exposure beams lithography tool
- Patent number 7,919,218
- Issue date Apr 5, 2011
- Micronic Laser Systems AB
- Fredrik Sjostrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Methods and apparatuses for increasing available power in optical s...
- Publication number 20100142022
- Publication date Jun 10, 2010
- Fredrik Sjöström
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for overlay compensation between subsequently...
- Publication number 20090325088
- Publication date Dec 31, 2009
- Micronic Laser Systems AB
- Fredrik Sjöström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and apparatuses for reducing mura effects in generated patt...
- Publication number 20090199152
- Publication date Aug 6, 2009
- Micronic Laser Systems AB
- Fredrik Sjostrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for a multiple exposure beams lithography tool
- Publication number 20090197188
- Publication date Aug 6, 2009
- Micronic Laser Systems AB
- Fredrik Sjostrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and apparatuses for detecting pattern errors
- Publication number 20090175530
- Publication date Jul 9, 2009
- Fredrik Sjostrom
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Registration method and apparatus therefor
- Publication number 20070236695
- Publication date Oct 11, 2007
- Fredrik Sjostrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Fredrik Sjostrom

Person

Patents Grantslast 30 patents

Method and apparatus for overlay compensation between subsequently...

Method for a multiple exposure beams lithography tool

Patents Applicationslast 30 patents

Methods and apparatuses for increasing available power in optical s...

Method and apparatus for overlay compensation between subsequently...

Methods and apparatuses for reducing mura effects in generated patt...

Method for a multiple exposure beams lithography tool

Methods and apparatuses for detecting pattern errors

Registration method and apparatus therefor