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Fu-Sheng Chu

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  • Hsinchu County, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Microscope apparatus
    • Patent number 11,619,806
    • Issue date Apr 4, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Fu-Sheng Chu
    • G02 - OPTICS
  • Information Patent Grant

    Microscope apparatus
    • Patent number 10,866,397
    • Issue date Dec 15, 2020
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Fu-Sheng Chu
    • G02 - OPTICS
  • Information Patent Grant

    Microscope apparatus and method for phase image acquisition
    • Patent number 10,295,813
    • Issue date May 21, 2019
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Fu-Sheng Chu
    • G02 - OPTICS
  • Information Patent Grant

    Method of repairing a mask
    • Patent number 9,400,424
    • Issue date Jul 26, 2016
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Sheng Chu
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Method for repairing a mask
    • Patent number 9,029,050
    • Issue date May 12, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Sheng Chu
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Microscope apparatus for phase image acquisition
    • Patent number 8,928,973
    • Issue date Jan 6, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Sheng Chu
    • G02 - OPTICS
  • Information Patent Grant

    Optical proximity correction for mask repair
    • Patent number 8,572,520
    • Issue date Oct 29, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Shiang Chou
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    MICROSCOPE APPARATUS
    • Publication number 20210072527
    • Publication date Mar 11, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Sheng CHU
    • G02 - OPTICS
  • Information Patent Application

    MICROSCOPE APPARATUS
    • Publication number 20190250393
    • Publication date Aug 15, 2019
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Sheng CHU
    • G02 - OPTICS
  • Information Patent Application

    METHOD OF REPAIRING A MASK
    • Publication number 20150219988
    • Publication date Aug 6, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Sheng Chu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MICROSCOPE APPARATUS AND METHOD FOR PHASE IMAGE ACQUISITION
    • Publication number 20150085356
    • Publication date Mar 26, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Sheng CHU
    • G02 - OPTICS
  • Information Patent Application

    Method for Repairing a Mask
    • Publication number 20140268119
    • Publication date Sep 18, 2014
    • Fu-Sheng Chu
    • G01 - MEASURING TESTING
  • Information Patent Application

    System and Method for Improving a Lithography Simulation Model
    • Publication number 20140123084
    • Publication date May 1, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yu-Po Tang
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    OPTICAL PROXIMITY CORRECTION FOR MASK REPAIR
    • Publication number 20130232454
    • Publication date Sep 5, 2013
    • Taiwan Semiconductor Manufacturing Company Ltd.
    • Chih-Shiang Chou
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MICROSCOPE APPARATUS FOR PHASE IMAGE ACQUISITION
    • Publication number 20130155498
    • Publication date Jun 20, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Sheng CHU
    • G02 - OPTICS