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Fujikazu Kitamura
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Light irradiation apparatus and drawing apparatus
Patent number
10,133,187
Issue date
Nov 20, 2018
SCREEN Holdings Co., Ltd.
Yoshio Furuya
G02 - OPTICS
Information
Patent Grant
Apparatus for measuring film thickness formed on object, apparatus...
Patent number
6,937,333
Issue date
Aug 30, 2005
Dainippon Screen Mfg. Co., Ltd.
Masahiro Horie
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
LIGHT IRRADIATION APPARATUS AND DRAWING APPARATUS
Publication number
20160349625
Publication date
Dec 1, 2016
SCREEN Holdings Co., Ltd.
Yoshio FURUYA
G02 - OPTICS
Information
Patent Application
Film forming apparatus and film forming method
Publication number
20050006560
Publication date
Jan 13, 2005
Dainippon Screen Mfg. Co., Ltd.
Masahiro Horie
G01 - MEASURING TESTING
Information
Patent Application
Apparatus for measuring film thickness formed on object, apparatus...
Publication number
20040075836
Publication date
Apr 22, 2004
Dainippon Screen Mfg. Co., Ltd.
Masahiro Horie
G01 - MEASURING TESTING