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Fujio Suzuki
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Shiroyama-machi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Determining method of thermal processing condition
Patent number
7,138,607
Issue date
Nov 21, 2006
Tokyo Electron Limited
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus, calibration method for temperature measur...
Patent number
6,922,522
Issue date
Jul 26, 2005
Tokyo Electron Limited
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Grant
Heat treatment apparatus and controller for heat treatment apparatu...
Patent number
6,847,015
Issue date
Jan 25, 2005
Tokyo Electron Limited
Wenling Wang
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Batch-type heat treatment apparatus and control method for the batc...
Patent number
6,803,548
Issue date
Oct 12, 2004
Tokyo Electron Limited
Wenling Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Determining method of thermal processing condition
Patent number
6,787,377
Issue date
Sep 7, 2004
Tokyo Electron Limited
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Batch type heat treatment system, method for controlling same, and...
Patent number
6,730,885
Issue date
May 4, 2004
Tokyo Electron Limited
Fujio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus, calibration method for temperature measur...
Patent number
6,622,104
Issue date
Sep 16, 2003
Tokyo Electron Limited
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Grant
Method of determining set temperature trajectory for heat treatment...
Patent number
6,495,805
Issue date
Dec 17, 2002
Tokyo Electron Limited
Koichi Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Power controlling unit and thermal processing unit
Patent number
6,351,105
Issue date
Feb 26, 2002
Tokyo Electron Limited
Fujio Suzuki
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method of temperature-calibrating heat treating apparatus
Patent number
6,329,643
Issue date
Dec 11, 2001
Tokyo Electron Limited
Fujio Suzuki
C30 - CRYSTAL GROWTH
Information
Patent Grant
Temperature control method and apparatus for use in thermal process...
Patent number
5,593,608
Issue date
Jan 14, 1997
Tokyo Electron Limited
Fujio Suzuki
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
Determining method of thermal processing condition
Publication number
20040226933
Publication date
Nov 18, 2004
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat treatment apparatus, calibration method for temperature measur...
Publication number
20040005147
Publication date
Jan 8, 2004
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Application
Method of determining heat treatment conditions
Publication number
20030109071
Publication date
Jun 12, 2003
Wenling Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of processing wafer
Publication number
20020127828
Publication date
Sep 12, 2002
Fujio Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heat treatment apparatus and controller for heat treatment apparatu...
Publication number
20020074324
Publication date
Jun 20, 2002
Wenling Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
Heat treatment apparatus, calibration method for temperature measur...
Publication number
20020069025
Publication date
Jun 6, 2002
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Application
Batch-type heat treatment apparatus and control method for the batc...
Publication number
20020045146
Publication date
Apr 18, 2002
Wenling Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Batch type heat treatment system, method for controlling same, and...
Publication number
20020014483
Publication date
Feb 7, 2002
Fujio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of determining set temperature trajectory for heat treatment...
Publication number
20020001788
Publication date
Jan 3, 2002
Koichi Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Power controlling unit and thermal processing unit
Publication number
20010024111
Publication date
Sep 27, 2001
Fujio Suzuki
G05 - CONTROLLING REGULATING