Fumiaki ARIYOSHI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and plasma processing apparatus
- Patent number 11,373,895
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Fumiaki Ariyoshi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING APPARATUS
- Publication number 20240297025
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Kota SENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD ELECTRODE ASSEMBLY AND PLASMA PROCESSING APPARATUS
- Publication number 20230158517
- Publication date May 25, 2023
- TOKYO ELECTRON LIMITED
- Ryosuke KUMAGAI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230077143
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Chishio KOSHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210005503
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Fumiaki ARIYOSHI
- H01 - BASIC ELECTRIC ELEMENTS