Fumiaki Hayase

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Nozzle and substrate processing apparatus using same
- Patent number 10,472,719
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of detoxifying exhaust pipe and film forming apparatus
- Patent number 10,053,776
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,929,008
- Issue date Mar 27, 2018
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing method, recording medium having recorded program...
- Patent number 8,815,112
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Tsuyoshi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250019815
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Shimon OTSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD
- Publication number 20250003070
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Akira MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Apparatus
- Publication number 20180258527
- Publication date Sep 13, 2018
- TOKYO ELECTRON LIMITED
- Yu SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DETOXIFYING EXHAUST PIPE AND FILM FORMING APPARATUS
- Publication number 20160220953
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME
- Publication number 20160138158
- Publication date May 19, 2016
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160111278
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid Processing Method, Recording Medium Having Recorded Program...
- Publication number 20120067846
- Publication date Mar 22, 2012
- Tsuyoshi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Fumiaki Hayase

Person

Patents Grantslast 30 patents

Nozzle and substrate processing apparatus using same

Method of detoxifying exhaust pipe and film forming apparatus

Substrate processing method and substrate processing apparatus

Liquid processing method, recording medium having recorded program...

Patents Applicationslast 30 patents

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD

Film Forming Apparatus

METHOD OF DETOXIFYING EXHAUST PIPE AND FILM FORMING APPARATUS

NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Liquid Processing Method, Recording Medium Having Recorded Program...