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Fumiaki Kawai
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Miyoshi-shi, JP
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last 30 patents
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Patent Grant
Film formation apparatus and film formation method
Patent number
11,142,842
Issue date
Oct 12, 2021
Denso Corporation
Tatsuji Nagaoka
C30 - CRYSTAL GROWTH
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last 30 patents
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Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD
Publication number
20200181795
Publication date
Jun 11, 2020
TOYOTA JIDOSHA KABUSHIKI KAISHA
Tatsuji Nagaoka
C30 - CRYSTAL GROWTH