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Fumiaki Maruyama
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Gunma-gun, JP
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Patents Grants
last 30 patents
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Patent Grant
Silicon wafer and a silicon epitaxial wafer having a polycrystal si...
Patent number
9,163,327
Issue date
Oct 20, 2015
Shin-Etsu Handotai Co., Ltd.
Fumiaki Maruyama
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Final polishing method for silicon single crystal wafer and silicon...
Patent number
8,569,148
Issue date
Oct 29, 2013
Shin-Etsu Handotai Co., Ltd.
Naoto Iizuka
B24 - GRINDING POLISHING
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Patent Grant
Wafer and epitaxial wafer, and manufacturing processes therefor
Patent number
8,273,146
Issue date
Sep 25, 2012
Shin-Etsu Handotai Co., Ltd.
Fumiaki Maruyama
F24 - HEATING RANGES VENTILATING
Patents Applications
last 30 patents
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Patent Application
WAFER AND EPITAXIAL WAFER, AND MANUFACTURING PROCESSES THEREFOR
Publication number
20120298995
Publication date
Nov 29, 2012
Shin-Etsu Handotai Co., Ltd.
Fumiaki Maruyama
C30 - CRYSTAL GROWTH
Information
Patent Application
FINAL POLISHING METHOD FOR SILICON SINGLE CRYSTAL WAFER AND SILICON...
Publication number
20100090314
Publication date
Apr 15, 2010
Shin-Etsu Handotai Co., Ltd.
Naoto Iizuka
B24 - GRINDING POLISHING