Fumiaki Sato

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Saijo-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer holding device and wafer chucking and dechucking method
- Patent number 10,896,843
- Issue date Jan 19, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Fumiaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing system, wafer processing method, and ion implantat...
- Patent number 8,096,744
- Issue date Jan 17, 2012
- SEN Corporation, an SHI and Axcelis Company
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling mover device
- Patent number 7,597,531
- Issue date Oct 6, 2009
- SEN Corporation, an SHI and Axcelis Company
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mover device and semiconductor manufacturing apparatus and method
- Patent number 7,187,143
- Issue date Mar 6, 2007
- Sumitomo Eaton Nova, Corporation
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER HOLDING DEVICE AND WAFER CHUCKING AND DECHUCKING METHOD
- Publication number 20180277418
- Publication date Sep 27, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Fumiaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer processing system, wafer processing method, and ion implantat...
- Publication number 20060182532
- Publication date Aug 17, 2006
- SUMITOMO EATON NOVA CORPORATION
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of controlling mover device, cooperative device of mover dev...
- Publication number 20050188924
- Publication date Sep 1, 2005
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mover device and semiconductor manufacturing apparatus and method
- Publication number 20040194565
- Publication date Oct 7, 2004
- Sumitomo Eaton Nova, Corporation
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS