Membership
Tour
Register
Log in
Fumihide Sato
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
6,187,623
Issue date
Feb 13, 2001
NEC Corporation
Toshiyuki Hirota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching apparatus and method of forming a via hole in an interl...
Patent number
5,441,595
Issue date
Aug 15, 1995
NEC Corporation
Yasushi Yamagata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching apparatus and method of forming a via hole in an interl...
Patent number
5,362,358
Issue date
Nov 8, 1994
NEC Corporation
Yasushi Yamagata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of leveling the laminated surface of a semiconductor substrate
Patent number
5,272,115
Issue date
Dec 21, 1993
NEC Corporation
Fumihide Sato
H01 - BASIC ELECTRIC ELEMENTS