Fumihiko Fukunaga

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement device, method and display device
- Patent number 10,996,569
- Issue date May 4, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring overlay and measuring apparatus, scanning elec...
- Patent number 10,783,625
- Issue date Sep 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscope device and inclined hole measurement method usi...
- Patent number 10,720,307
- Issue date Jul 21, 2020
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G01 - MEASURING TESTING
Information Patent Grant
Overlay error measurement device and computer program
- Patent number 10,712,152
- Issue date Jul 14, 2020
- HITACHI HIGH-TECH CORPORATION
- Fumihiko Fukunaga
- G01 - MEASURING TESTING
Information Patent Grant
Overlay measurement method, device, and display device
- Patent number 10,094,658
- Issue date Oct 9, 2018
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspecting and measuring device and program
- Patent number 9,858,659
- Issue date Jan 2, 2018
- Hitachi High-Technologies Corporation
- Tsuyoshi Minakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring overlay and measuring apparatus, scanning elec...
- Patent number 9,799,112
- Issue date Oct 24, 2017
- Hitachi High-Technologies Corporation
- Minoru Harada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Superposition measuring apparatus, superposition measuring method,...
- Patent number 9,390,885
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,342,878
- Issue date May 17, 2016
- Hitachi High-Technologies Corporation
- Kohei Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 9,165,356
- Issue date Oct 20, 2015
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects of circuit patterns
- Patent number 8,111,902
- Issue date Feb 7, 2012
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON MICROSCOPE DEVICE AND INCLINED HOLE MEASUREMENT METHOD USI...
- Publication number 20190362933
- Publication date Nov 28, 2019
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT DEVICE, METHOD AND DISPLAY DEVICE
- Publication number 20190033728
- Publication date Jan 31, 2019
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Overlay Error Measurement Device and Computer Program
- Publication number 20190017817
- Publication date Jan 17, 2019
- Hitachi High-Technologies Corporation
- Fumihiko FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...
- Publication number 20180025482
- Publication date Jan 25, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OVERLAY MEASUREMENT METHOD, DEVICE, AND DISPLAY DEVICE
- Publication number 20170322021
- Publication date Nov 9, 2017
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G01 - MEASURING TESTING
Information Patent Application
Superposition Measuring Apparatus, Superposition Measuring Method,...
- Publication number 20160056014
- Publication date Feb 25, 2016
- Hitachi High-Technologies Corporation
- Takuma YAMAMOTO
- G01 - MEASURING TESTING
Information Patent Application
Pattern Inspecting and Measuring Device and Program
- Publication number 20150228063
- Publication date Aug 13, 2015
- Hitachi High-Technologies Corporation
- Tsuyoshi Minakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...
- Publication number 20140375793
- Publication date Dec 25, 2014
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Inspection Method and Defect Inspection Device
- Publication number 20140169657
- Publication date Jun 19, 2014
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20130265408
- Publication date Oct 10, 2013
- Kohei Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting defects of circuit patterns
- Publication number 20070047800
- Publication date Mar 1, 2007
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Focus correction method for inspection of circuit patterns
- Publication number 20060284088
- Publication date Dec 21, 2006
- Fumihiko Fukunaga
- H01 - BASIC ELECTRIC ELEMENTS

Fumihiko Fukunaga

Person

Patents Grantslast 30 patents

Measurement device, method and display device

Method for measuring overlay and measuring apparatus, scanning elec...

Electron microscope device and inclined hole measurement method usi...

Overlay error measurement device and computer program

Overlay measurement method, device, and display device

Pattern inspecting and measuring device and program

Method for measuring overlay and measuring apparatus, scanning elec...

Superposition measuring apparatus, superposition measuring method,...

Charged particle beam apparatus

Defect inspection method and defect inspection device

Method and apparatus for inspecting defects of circuit patterns

Patents Applicationslast 30 patents

ELECTRON MICROSCOPE DEVICE AND INCLINED HOLE MEASUREMENT METHOD USI...

MEASUREMENT DEVICE, METHOD AND DISPLAY DEVICE

Overlay Error Measurement Device and Computer Program

METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...

OVERLAY MEASUREMENT METHOD, DEVICE, AND DISPLAY DEVICE

Superposition Measuring Apparatus, Superposition Measuring Method,...

Pattern Inspecting and Measuring Device and Program

METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...

Defect Inspection Method and Defect Inspection Device

CHARGED PARTICLE BEAM APPARATUS

Method and apparatus for inspecting defects of circuit patterns

Focus correction method for inspection of circuit patterns