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Fumihiko Ikeda
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Kumamoto-ken, JP
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last 30 patents
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Patent Grant
Coating method and coating unit
Patent number
8,307,778
Issue date
Nov 13, 2012
Tokyo Electron Limited
Toshifumi Inamasu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
COATING METHOD AND COATING UNIT
Publication number
20090311434
Publication date
Dec 17, 2009
TOKYO ELECTRON LIMITED
Toshifumi Inamasu
H01 - BASIC ELECTRIC ELEMENTS