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Fumihiko Ishida
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Kawasaki, JP
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last 30 patents
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Patent Grant
Fine positioning device, as for the stage of a scanning tunneling m...
Patent number
5,051,594
Issue date
Sep 24, 1991
Japan Ministry of International Trade and Industry
Nobuhiro Tsuda
B82 - NANO-TECHNOLOGY
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Patent Grant
Microscope apparatus
Patent number
4,914,293
Issue date
Apr 3, 1990
Kabushiki Kaisha Toshiba
Masakazu Hayashi
B82 - NANO-TECHNOLOGY