TREA

Fumihiko KAJI

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  • Sendai City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 9,343,270
    • Issue date May 17, 2016
    • Tokyo Electron Limited
    • Toshihisa Nozawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20140238607
    • Publication date Aug 28, 2014
    • TOKYO ELECTRON LIMITED
    • Toshihisa NOZAWA
    • H01 - BASIC ELECTRIC ELEMENTS