Fumihiko Sakata

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
System for detecting the endpoint of the polishing of a semiconduct...
- Patent number 6,042,454
- Issue date Mar 28, 2000
- Ebara Corporation
- Katsuhide Watanabe
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for determining endpoint during a polishing pr...
- Patent number 5,830,041
- Issue date Nov 3, 1998
- Ebara Corporation
- Tamami Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing endpoint detection method
- Patent number 5,639,388
- Issue date Jun 17, 1997
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING