Fumihiko Tokukra

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus for polishing a work having two surfaces
- Patent number 8,221,198
- Issue date Jul 17, 2012
- Fujitsu Limited
- Fumihiko Tokukra
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Polishing apparatus, substrate manufacturing method, and electronic...
- Publication number 20090075574
- Publication date Mar 19, 2009
- FUJITSU LIMITED
- Fumihiko Tokukra
- B24 - GRINDING POLISHING