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Fumihiro GOBOU
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Electrostatic chuck device
Patent number
10,068,790
Issue date
Sep 4, 2018
Sumitomo Osaka Cement Co., Ltd.
Hitoshi Kouno
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ELECTROSTATIC CHUCK DEVICE
Publication number
20170287764
Publication date
Oct 5, 2017
Sumitomo Osaka Cement Co., Ltd.
Hitoshi KOUNO
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Patent Application
ELECTROSTATIC CHUCK DEVICE
Publication number
20170243778
Publication date
Aug 24, 2017
Sumitomo Osaka Cement Co., Ltd.
Hitoshi KOUNO
H01 - BASIC ELECTRIC ELEMENTS