Fumihiro GOBOU

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck device

    • Patent number 10,068,790
    • Issue date Sep 4, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Hitoshi Kouno
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE

    • Publication number 20170287764
    • Publication date Oct 5, 2017
    • Sumitomo Osaka Cement Co., Ltd.
    • Hitoshi KOUNO
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE

    • Publication number 20170243778
    • Publication date Aug 24, 2017
    • Sumitomo Osaka Cement Co., Ltd.
    • Hitoshi KOUNO
    • H01 - BASIC ELECTRIC ELEMENTS