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Diagnostic system
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Patent number 11,899,437
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Issue date Feb 13, 2024
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HITACHI HIGH-TECH CORPORATION
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Fumihiro Sasajima
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G05 - CONTROLLING REGULATING
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Charged particle beam apparatus
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Patent number 10,714,304
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Issue date Jul 14, 2020
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HITACHI HIGH-TECH CORPORATION
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Muneyuki Fukuda
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam apparatus
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Patent number 10,340,115
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Issue date Jul 2, 2019
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Hitachi High-Technologies Corporation
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Muneyuki Fukuda
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H01 - BASIC ELECTRIC ELEMENTS
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Scanning electron microscope
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Patent number 10,186,399
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Issue date Jan 22, 2019
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Hitachi High-Technologies Corporation
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Mayuka Osaki
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam apparatus
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Patent number 9,892,887
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Issue date Feb 13, 2018
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Hitachi High-Technologies Corporation
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Muneyuki Fukuda
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H01 - BASIC ELECTRIC ELEMENTS
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Pattern measuring method
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Patent number 7,288,764
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Issue date Oct 30, 2007
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Hitachi High-Technologies Corporation
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Fumihiro Sasajima
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G01 - MEASURING TESTING
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Pattern measuring method
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Patent number 7,180,062
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Issue date Feb 20, 2007
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Hitachi High-Technologies Corporation
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Fumihiro Sasajima
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G01 - MEASURING TESTING
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