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Fumikazu NOZAWA

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  • Tokyo, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS
    • Publication number 20240052484
    • Publication date Feb 15, 2024
    • L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
    • Toshiyuki NAKAGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBLIMATED GAS SUPPLY SYSTEM AND SUBLIMATED GAS SUPPLY METHOD
    • Publication number 20190284684
    • Publication date Sep 19, 2019
    • L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
    • Chika SHIGAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NEON RECOVERING/PURIFYING SYSTEM AND NEON RECOVERING/PURIFYING METHOD
    • Publication number 20180354795
    • Publication date Dec 13, 2018
    • L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
    • Sayaka SUZUKI
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION
    • Publication number 20180337510
    • Publication date Nov 22, 2018
    • L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
    • Terumasa KOURA
    • H01 - BASIC ELECTRIC ELEMENTS