Fuming Wang

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology data correction using image quality metric
- Patent number 12,189,307
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Fuming Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining contribution to a fingerprint
- Patent number 10,816,904
- Issue date Oct 27, 2020
- ASML Netherlands B.V.
- Davit Harutyunyan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Single wavelength ellipsometry with improved spot size capability
- Patent number 9,574,992
- Issue date Feb 21, 2017
- KLA-Tencor Corporation
- Esen Salcin
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROCESS WINDOW BASED ON FAILURE RATE
- Publication number 20230221652
- Publication date Jul 13, 2023
- ASML NETHERLANS B.V.
- Aiqin JIANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PRO...
- Publication number 20230076218
- Publication date Mar 9, 2023
- ASML NETHERLANDS B.V.
- Koenraad VAN INGEN SCHENAU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK DEFECT DETECTION
- Publication number 20230046682
- Publication date Feb 16, 2023
- ASML NETHERLANDS B.V.
- Fuming WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT
- Publication number 20220342319
- Publication date Oct 27, 2022
- ASML NETHERLANDS B.V.
- Davit Harutyunyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE GEOMETRY METHOD AND SYSTEM
- Publication number 20220327364
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Stefan HUNSCHE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY DATA CORRECTION USING IMAGE QUALITY METRIC
- Publication number 20210241449
- Publication date Aug 5, 2021
- ASML NETHERLANDS B.V.
- Fuming WANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT
- Publication number 20210003927
- Publication date Jan 7, 2021
- ASML NETHERLANDS B.V.
- Davit Harutyunyan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT
- Publication number 20190271919
- Publication date Sep 5, 2019
- ASML NETHERLANDS B.V.
- Davit HARUTYUNYAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Fuming Wang

Person

Patents Grantslast 30 patents

Metrology data correction using image quality metric

Method for determining contribution to a fingerprint

Single wavelength ellipsometry with improved spot size capability

Patents Applicationslast 30 patents

PROCESS WINDOW BASED ON FAILURE RATE

METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PRO...

MASK DEFECT DETECTION

METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT

SEMICONDUCTOR DEVICE GEOMETRY METHOD AND SYSTEM

METROLOGY DATA CORRECTION USING IMAGE QUALITY METRIC

METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT

METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT