Fuminori HAYANO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement processing device, measurement processing method, measu...
- Patent number 11,016,039
- Issue date May 25, 2021
- Nikon Corporation
- Nobukatsu Machii
- G01 - MEASURING TESTING
Information Patent Grant
Measurement processing device, measurement processing method, measu...
- Patent number 11,016,038
- Issue date May 25, 2021
- Nikon Corporation
- Nobukatsu Machii
- G01 - MEASURING TESTING
Information Patent Grant
Measurement processing device, x-ray inspection device, measurement...
- Patent number 10,809,209
- Issue date Oct 20, 2020
- Nikon Corporation
- Hirotomo Yashima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement processing device, x-ray inspection apparatus, method f...
- Patent number 10,760,902
- Issue date Sep 1, 2020
- Nikon Corporation
- Nobukatsu Machii
- G01 - MEASURING TESTING
Information Patent Grant
Measurement processing device, x-ray inspection apparatus, method f...
- Patent number 10,557,706
- Issue date Feb 11, 2020
- Nikon Corporation
- Nobukatsu Machii
- G01 - MEASURING TESTING
Information Patent Grant
Measurement processing device, x-ray inspection apparatus, method f...
- Patent number 10,502,562
- Issue date Dec 10, 2019
- Nikon Corporation
- Nobukatsu Machii
- G01 - MEASURING TESTING
Information Patent Grant
Measurement processing device, X-ray inspection device, measurement...
- Patent number 10,481,106
- Issue date Nov 19, 2019
- Nikon Corporation
- Hirotomo Yashima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement processing device, X-ray inspection device, measurement...
- Patent number 10,444,165
- Issue date Oct 15, 2019
- Nikon Corporation
- Hirotomo Yashima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Surface inspection device and surface inspection method
- Patent number 8,269,969
- Issue date Sep 18, 2012
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspecting method and surface inspecting apparatus
- Patent number 8,115,916
- Issue date Feb 14, 2012
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Particle inspecting apparatus and method using fourier transform
- Patent number 5,719,405
- Issue date Feb 17, 1998
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and apparatus, and defect display method
- Patent number 5,663,569
- Issue date Sep 2, 1997
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Foreign particle inspection apparatus
- Patent number 5,623,340
- Issue date Apr 22, 1997
- Nikon Corporation
- Kenji Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus
- Patent number 5,473,426
- Issue date Dec 5, 1995
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Foreign particle inspecting method and apparatus with correction fo...
- Patent number 5,436,464
- Issue date Jul 25, 1995
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Light scanning apparatus for detecting foreign particles on surface...
- Patent number 5,363,187
- Issue date Nov 8, 1994
- Nikon Corporation
- Tsuneyuki Hagiwara
- G01 - MEASURING TESTING
Information Patent Grant
Foreign particle inspection apparatus
- Patent number 5,149,982
- Issue date Sep 22, 1992
- Nikon Corporation
- Tsuneyuki Hagiwara
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting apparatus using multiple color light to detect de...
- Patent number 5,072,128
- Issue date Dec 10, 1991
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for detecting foreign particles on a surface of a reticle...
- Patent number 4,999,510
- Issue date Mar 12, 1991
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspecting apparatus for determining presence and location of forei...
- Patent number 4,966,457
- Issue date Oct 30, 1990
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus with four light detectors for checking surface of mask wi...
- Patent number 4,889,998
- Issue date Dec 26, 1989
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Conveyor arm apparatus with gap detection
- Patent number 4,803,373
- Issue date Feb 7, 1989
- Nikon Corporation
- Kazunori Imamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SETTING METHOD, INSPECTION METHOD, DEFECT EVALUATION DEVICE AND STR...
- Publication number 20240036221
- Publication date Feb 1, 2024
- Nikon Corporation
- Fuminori HAYANO
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, MEASUREMENT...
- Publication number 20200003705
- Publication date Jan 2, 2020
- Nikon Corporation
- Hirotomo YASHIMA
- G01 - MEASURING TESTING
Information Patent Application
SETTING METHOD, INSPECTION METHOD, DEFECT EVALUATION DEVICE AND STR...
- Publication number 20190310385
- Publication date Oct 10, 2019
- Nikon Corporation
- Fuminori HAYANO
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT PROCESSING DEVICE, MEASUREMENT PROCESSING METHOD, MEASU...
- Publication number 20190195811
- Publication date Jun 27, 2019
- Nikon Corporation
- Nobukatsu MACHII
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION APPARATUS, METHOD F...
- Publication number 20180372485
- Publication date Dec 27, 2018
- Nikon Corporation
- Nobukatsu MACHII
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, MEASUREMENT...
- Publication number 20180120243
- Publication date May 3, 2018
- Nikon Corporation
- Hirotomo YASHIMA
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION APPARATUS, METHOD F...
- Publication number 20170176181
- Publication date Jun 22, 2017
- Nikon Corporation
- Nobukatsu MACHII
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTION DEVICE AND SURFACE INSPECTION METHOD
- Publication number 20120050739
- Publication date Mar 1, 2012
- Fuminori HAYANO
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTING METHOD AND SURFACE INSPECTING APPARATUS
- Publication number 20110026017
- Publication date Feb 3, 2011
- NIKON CORPORATION
- Fuminori HAYANO
- G01 - MEASURING TESTING

Fuminori HAYANO

Person

Patents Grantslast 30 patents

Measurement processing device, measurement processing method, measu...

Measurement processing device, measurement processing method, measu...

Measurement processing device, x-ray inspection device, measurement...

Measurement processing device, x-ray inspection apparatus, method f...

Measurement processing device, x-ray inspection apparatus, method f...

Measurement processing device, x-ray inspection apparatus, method f...

Measurement processing device, X-ray inspection device, measurement...

Measurement processing device, X-ray inspection device, measurement...

Surface inspection device and surface inspection method

Surface inspecting method and surface inspecting apparatus

Particle inspecting apparatus and method using fourier transform

Defect inspection method and apparatus, and defect display method

Foreign particle inspection apparatus

Defect inspection apparatus

Foreign particle inspecting method and apparatus with correction fo...

Light scanning apparatus for detecting foreign particles on surface...

Foreign particle inspection apparatus

Defect inspecting apparatus using multiple color light to detect de...

Apparatus for detecting foreign particles on a surface of a reticle...

Inspecting apparatus for determining presence and location of forei...

Apparatus with four light detectors for checking surface of mask wi...

Conveyor arm apparatus with gap detection

Patents Applicationslast 30 patents

SETTING METHOD, INSPECTION METHOD, DEFECT EVALUATION DEVICE AND STR...

MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, MEASUREMENT...

SETTING METHOD, INSPECTION METHOD, DEFECT EVALUATION DEVICE AND STR...

MEASUREMENT PROCESSING DEVICE, MEASUREMENT PROCESSING METHOD, MEASU...

MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION APPARATUS, METHOD F...

MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, MEASUREMENT...

MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION APPARATUS, METHOD F...

SURFACE INSPECTION DEVICE AND SURFACE INSPECTION METHOD

SURFACE INSPECTING METHOD AND SURFACE INSPECTING APPARATUS