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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing method
- Patent number RE44179
- Issue date Apr 30, 2013
- Nuflare Technology, Inc.
- Takayuki Abe
- 250 - Radiant energy
Information Patent Grant
Charged particle beam writing method
- Patent number 7,759,659
- Issue date Jul 20, 2010
- Nuflare Technology, Inc.
- Takayuki Abe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD
- Publication number 20090057576
- Publication date Mar 5, 2009
- NuFlare Technology, Inc.
- Takayuki Abe
- B82 - NANO-TECHNOLOGY