Fumio IWAMOTO

Person

Oyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Target supply device, extreme ultraviolet light generation apparatu...
- Patent number 11,659,646
- Issue date May 23, 2023
- Gigaphoton Inc.
- Koji Yamasaki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,395,398
- Issue date Jul 19, 2022
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, extreme ultraviolet light generating apparatu...
- Patent number 11,360,391
- Issue date Jun 14, 2022
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, extreme ultraviolet light generating apparatu...
- Patent number 11,067,907
- Issue date Jul 20, 2021
- Gigaphoton Inc.
- Masaki Nakano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, target material refining method, recording me...
- Patent number 10,629,414
- Issue date Apr 21, 2020
- Gigaphoton Inc.
- Fumio Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Droplet collection device
- Patent number 10,582,600
- Issue date Mar 3, 2020
- Gigaphoton Inc.
- Kazukiyo Kamikanna
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 10,506,697
- Issue date Dec 10, 2019
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 10,251,253
- Issue date Apr 2, 2019
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device and extreme ultraviolet light generating device
- Patent number 10,225,917
- Issue date Mar 5, 2019
- Gigaphoton Inc.
- Takahisa Fujimaki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Filter and target supply apparatus
- Patent number 10,143,074
- Issue date Nov 27, 2018
- Gigaphoton Inc.
- Tomohide Ichinose
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Extreme UV light generation device and target recovery apparatus
- Patent number 10,028,366
- Issue date Jul 17, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target supply apparatus and EUV light generating apparatus
- Patent number 10,009,991
- Issue date Jun 26, 2018
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme UV light generation apparatus and method
- Patent number 9,949,354
- Issue date Apr 17, 2018
- Gigaphoton Inc.
- Takashi Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,894,744
- Issue date Feb 13, 2018
- Gigaphoton Inc.
- Fumio Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target producing apparatus
- Patent number 9,883,574
- Issue date Jan 30, 2018
- Gigaphoton Inc.
- Fumio Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,854,658
- Issue date Dec 26, 2017
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus including target dro...
- Patent number 9,699,877
- Issue date Jul 4, 2017
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
- Publication number 20230266677
- Publication date Aug 24, 2023
- Gigaphoton Inc.
- Fumio IWAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LIGHT GENERATION APPARATUS, ELECTRONIC DEVICE MANUFACTURING MET...
- Publication number 20230142875
- Publication date May 11, 2023
- Gigaphoton Inc.
- Fumio IWAMOTO
- G01 - MEASURING TESTING
Information Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
- Publication number 20220159818
- Publication date May 19, 2022
- Gigaphoton Inc.
- Koji YAMASAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20220110204
- Publication date Apr 7, 2022
- Gigaphoton Inc.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATING APPARATU...
- Publication number 20200363735
- Publication date Nov 19, 2020
- Gigaphoton Inc.
- Masaki NAKANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATING APPARATU...
- Publication number 20200341383
- Publication date Oct 29, 2020
- Gigaphoton Inc.
- Fumio IWAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...
- Publication number 20190237303
- Publication date Aug 1, 2019
- Gigaphoton Inc.
- Fumio IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20190174614
- Publication date Jun 6, 2019
- Gigaphoton Inc.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET COLLECTION DEVICE
- Publication number 20190150261
- Publication date May 16, 2019
- Gigaphoton Inc.
- Kazukiyo KAMIKANNA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
- Publication number 20180288863
- Publication date Oct 4, 2018
- Gigaphoton Inc.
- Takahisa FUJIMAKI
- G05 - CONTROLLING REGULATING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20180160519
- Publication date Jun 7, 2018
- Gigaphoton Inc.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME UV LIGHT GENERATION DEVICE AND TARGET RECOVERY APPARATUS
- Publication number 20170307979
- Publication date Oct 26, 2017
- Gigaphoton Inc.
- Tsukasa HORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATOR UNIT AND TARGET SUPPLY DEVICE
- Publication number 20170215266
- Publication date Jul 27, 2017
- Gigaphoton Inc.
- Toshiyuki HIRASHITA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...
- Publication number 20170053780
- Publication date Feb 23, 2017
- Gigaphoton Inc.
- Fumio IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET PRODUCING APPARATUS
- Publication number 20160270199
- Publication date Sep 15, 2016
- Gigaphoton Inc.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160255709
- Publication date Sep 1, 2016
- GIGAPHOTON INC.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FILTER AND TARGET SUPPLY APPARATUS
- Publication number 20160227637
- Publication date Aug 4, 2016
- Gigaphoton Inc.
- Tomohide ICHINOSE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...
- Publication number 20160227638
- Publication date Aug 4, 2016
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160192470
- Publication date Jun 30, 2016
- GIGAPHOTON INC.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY APPARATUS AND EUV LIGHT GENERATING APPARATUS
- Publication number 20160165708
- Publication date Jun 9, 2016
- Gigaphoton Inc.
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME UV LIGHT GENERATION APPARATUS
- Publication number 20160037616
- Publication date Feb 4, 2016
- GIGAPHOTON INC.
- Takashi SAITO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Fumio IWAMOTO

Person

Patents Grantslast 30 patents

Target supply device, extreme ultraviolet light generation apparatu...

Extreme ultraviolet light generation apparatus and electronic devic...

Target supply device, extreme ultraviolet light generating apparatu...

Target supply device, extreme ultraviolet light generating apparatu...

Target supply device, target material refining method, recording me...

Droplet collection device

Extreme ultraviolet light generation device

Extreme ultraviolet light generation device

Target supply device and extreme ultraviolet light generating device

Filter and target supply apparatus

Extreme UV light generation device and target recovery apparatus

Target supply apparatus and EUV light generating apparatus

Extreme UV light generation apparatus and method

Extreme ultraviolet light generation apparatus

Target producing apparatus

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation apparatus including target dro...

Patents Applicationslast 30 patents

TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...

EUV LIGHT GENERATION APPARATUS, ELECTRONIC DEVICE MANUFACTURING MET...

TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATING APPARATU...

TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATING APPARATU...

TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

DROPLET COLLECTION DEVICE

TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

EXTREME UV LIGHT GENERATION DEVICE AND TARGET RECOVERY APPARATUS

VIBRATOR UNIT AND TARGET SUPPLY DEVICE

TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...

TARGET PRODUCING APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

FILTER AND TARGET SUPPLY APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

TARGET SUPPLY APPARATUS AND EUV LIGHT GENERATING APPARATUS

EXTREME UV LIGHT GENERATION APPARATUS