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Fumio Kaiho
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Tokyo, JP
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last 30 patents
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Patent Grant
Two-dimensional positioning apparatus and method for measuring lase...
Patent number
6,603,562
Issue date
Aug 5, 2003
Yokogawa Electric Corporation
Yutaka Ono
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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last 30 patents
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Patent Application
XY STAGE
Publication number
20090014932
Publication date
Jan 15, 2009
Yokogawa Electric Corporation
Mitsuhiro Nikaido
G05 - CONTROLLING REGULATING