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Fumio Sakai
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Imprint apparatus, imprint method, and method for producing device
Patent number
10,144,156
Issue date
Dec 4, 2018
Canon Kabushiki Kaisha
Hideki Matsumoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
Patent number
9,880,463
Issue date
Jan 30, 2018
Canon Kabushiki Kaisha
Kohei Wakabayashi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Imprint apparatus, imprint method, and method for producing device
Patent number
9,387,607
Issue date
Jul 12, 2016
Canon Kabushiki Kaisha
Hideki Matsumoto
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Projection exposure apparatus including an optical characteristic d...
Patent number
5,925,887
Issue date
Jul 20, 1999
Canon Kabushiki Kaisha
Fumio Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method wherein alignment is carried out by c...
Patent number
5,751,404
Issue date
May 12, 1998
Canon Kabushiki Kaisha
Eiichi Murakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and exposure method
Patent number
5,734,462
Issue date
Mar 31, 1998
Canon Kabushiki Kaisha
Fumio Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment method and a projection exposure apparatus using the same
Patent number
4,952,060
Issue date
Aug 28, 1990
Canon Kabushiki Kaisha
Hideki Ina
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus
Patent number
4,814,829
Issue date
Mar 21, 1989
Canon Kabushiki Kaisha
Masao Kosugi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Surface shape controlling device
Patent number
4,737,824
Issue date
Apr 12, 1988
Canon Kabushiki Kaisha
Fumio Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR PRODUCING DEVICE
Publication number
20150290846
Publication date
Oct 15, 2015
Canon Kabushiki Kaisha
Hideki Matsumoto
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
Publication number
20120313293
Publication date
Dec 13, 2012
Canon Kabushiki Kaisha
Kohei Wakabayashi
B82 - NANO-TECHNOLOGY
Information
Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR PRODUCING DEVICE
Publication number
20120274006
Publication date
Nov 1, 2012
Canon Kabushiki Kaisha
Hideki Matsumoto
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL