Fumio Tahara

Person

Annaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon wafer heat treatment method
- Patent number 9,708,726
- Issue date Jul 18, 2017
- Shin-Etsu Handotai Co., Ltd.
- Wei Feng Qu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for detecting crystal defects
- Patent number 9,606,030
- Issue date Mar 28, 2017
- Shin-Etsu Handotai Co., Ltd.
- Wei Feng Qu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing silicon single crystal wafer and annealed...
- Patent number 8,916,953
- Issue date Dec 23, 2014
- Shin-Etsu Handotai Co., Ltd.
- Wei Feng Qu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Bonded substrate and manufacturing method thereof
- Patent number 8,900,971
- Issue date Dec 2, 2014
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing bonded substrate having an insulator layer...
- Patent number 8,877,609
- Issue date Nov 4, 2014
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for evaluating oxide dielectric breakdown voltage of a silic...
- Patent number 8,551,246
- Issue date Oct 8, 2013
- Shin-Etsu Handotai Co., Ltd.
- Fumio Tahara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of manufacturing silicon epitaxial wafer
- Patent number 7,713,851
- Issue date May 11, 2010
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR HEAT-TREATING SILICON SINGLE CRYSTAL WAFER
- Publication number 20170253995
- Publication date Sep 7, 2017
- Shin-Etsu Handotai Co., Ltd.
- Wei Feng QU
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON WAFER HEAT TREATMENT METHOD
- Publication number 20160130718
- Publication date May 12, 2016
- Shin-Etsu Handotai Co., Ltd.
- Wei Feng QU
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF MANUFACTURING SOI WAFER
- Publication number 20150287630
- Publication date Oct 8, 2015
- Shin-Etsu Handotai Co., Ltd.
- Wei Feng Qu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETECTING CRYSTAL DEFECTS
- Publication number 20140119399
- Publication date May 1, 2014
- Shin-Etsu Handotai Co., Ltd.
- Wei Feng Qu
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MANUFACTURING BONDED SUBSTRATE HAVING AN INSULATOR LAYER...
- Publication number 20140120695
- Publication date May 1, 2014
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDED SUBSTRATE AND MANUFACTURING METHOD THEREOF
- Publication number 20130341763
- Publication date Dec 26, 2013
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL WAFER AND ANNEALED...
- Publication number 20130264685
- Publication date Oct 10, 2013
- Shin-Etsu Handotai Co., Ltd.
- Wei Feng Qu
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON SINGLE CRYSTAL WAFER AND METHOD FOR MANUFACTURING SILICON S...
- Publication number 20110045246
- Publication date Feb 24, 2011
- Shin-Etsu Handotai Co., Ltd.
- Fumio Tahara
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon Epitaxial Wafer And Manufacturing Method Thereof
- Publication number 20080038526
- Publication date Feb 14, 2008
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon Epitaxial Wafer and Manufacturing Method Thereof
- Publication number 20070269338
- Publication date Nov 22, 2007
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of manufacturing silicon epitaxial wafer
- Publication number 20070243699
- Publication date Oct 18, 2007
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- H01 - BASIC ELECTRIC ELEMENTS

Fumio Tahara

Person

Patents Grantslast 30 patents

Silicon wafer heat treatment method

Method for detecting crystal defects

Method for manufacturing silicon single crystal wafer and annealed...

Bonded substrate and manufacturing method thereof

Method for manufacturing bonded substrate having an insulator layer...

Method for evaluating oxide dielectric breakdown voltage of a silic...

Method of manufacturing silicon epitaxial wafer

Patents Applicationslast 30 patents

METHOD FOR HEAT-TREATING SILICON SINGLE CRYSTAL WAFER

SILICON WAFER HEAT TREATMENT METHOD

METHOD OF MANUFACTURING SOI WAFER

METHOD FOR DETECTING CRYSTAL DEFECTS

METHOD FOR MANUFACTURING BONDED SUBSTRATE HAVING AN INSULATOR LAYER...

BONDED SUBSTRATE AND MANUFACTURING METHOD THEREOF

METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL WAFER AND ANNEALED...

SILICON SINGLE CRYSTAL WAFER AND METHOD FOR MANUFACTURING SILICON S...

Silicon Epitaxial Wafer And Manufacturing Method Thereof

Silicon Epitaxial Wafer and Manufacturing Method Thereof

Method of manufacturing silicon epitaxial wafer