Fumio YAMAZAKI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method of modulating high frequency bias power to pr...
- Patent number 9,548,214
- Issue date Jan 17, 2017
- Tokyo Electron Limited
- Fumio Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching processing method
- Patent number 9,496,150
- Issue date Nov 15, 2016
- Tokyo Electron Limited
- Hiromasa Mochiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching processing method
- Patent number 9,373,521
- Issue date Jun 21, 2016
- Tokyo Electron Limited
- Hiromasa Mochiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method
- Patent number 9,034,198
- Issue date May 19, 2015
- Tokyo Electron Limited
- Akira Nakagawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma etching method, plasma etching apparatus and storage medium
- Patent number 8,383,001
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Hiromasa Mochiki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20160181119
- Publication date Jun 23, 2016
- TOKYO ELECTRON LIMITED
- Fumio Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING PROCESSING METHOD
- Publication number 20150170933
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Hiromasa MOCHIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20140144876
- Publication date May 29, 2014
- TOKYO ELECTRON LIMITED
- Akira Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING PROCESSING METHOD
- Publication number 20110244691
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Hiromasa MOCHIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS AND STORAGE MEDIUM
- Publication number 20100213162
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Hiromasa Mochiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, CONTROL PROGRAM AN...
- Publication number 20090170335
- Publication date Jul 2, 2009
- TOKYO ELECTRON LIMITED
- Satoshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS