TREA

Fumitaka Amano

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  • Minato-ku, Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing method
    • Patent number 9,558,962
    • Issue date Jan 31, 2017
    • Tokyo Electron Limited
    • Kandabara N. Tapily
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming method and substrate processing apparatus
    • Patent number 7,981,794
    • Issue date Jul 19, 2011
    • Tokyo Electron Limited
    • Kensaku Narushima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Substrate Processing Method
    • Publication number 20160049309
    • Publication date Feb 18, 2016
    • TOKYO ELECTRON LIMITED
    • Kandabara N. Tapily
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20100304561
    • Publication date Dec 2, 2010
    • Tokyo Electron Limited
    • Kensaku Narushima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...