Fumitaka Shoji

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer-supporting device and method for producing same
- Patent number 10,854,498
- Issue date Dec 1, 2020
- ASM IP Holding B.V.
- Fumitaka Shoji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma film forming method
- Patent number 10,734,219
- Issue date Aug 4, 2020
- ASM IP Holdings B.V.
- Fumitaka Shoji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming film by plasma-assisted deposition using two-fre...
- Patent number 9,365,924
- Issue date Jun 14, 2016
- ASM IP Holding B.V.
- Yuya Nonaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming layer constituted by repeated stacked layers
- Patent number 9,018,093
- Issue date Apr 28, 2015
- ASM IP Holding B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REACTOR SYSTEM COMPRISING A TUNING CIRCUIT
- Publication number 20210348273
- Publication date Nov 11, 2021
- ASM IP HOLDING B.V.
- Ryu Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD FOR MO...
- Publication number 20210225622
- Publication date Jul 22, 2021
- ASM IP HOLDING B.V.
- Fumitaka SHOJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA FILM FORMING METHOD
- Publication number 20200098563
- Publication date Mar 26, 2020
- ASM IP HOLDING B.V.
- Fumitaka SHOJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method For Forming Film By Plasma-Assisted Deposition Using Two-Fre...
- Publication number 20140349033
- Publication date Nov 27, 2014
- ASM IP HOLDING B.V.
- Yuya Nonaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Forming Layer Constituted by Repeated Stacked Layers
- Publication number 20140213065
- Publication date Jul 31, 2014
- ASM IP HOLDING B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer-Supporting Device and Method for Producing Same
- Publication number 20130014896
- Publication date Jan 17, 2013
- ASM JAPAN K.K.
- Fumitaka Shoji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Fumitaka Shoji

Person

Patents Grantslast 30 patents

Wafer-supporting device and method for producing same

Plasma film forming method

Method for forming film by plasma-assisted deposition using two-fre...

Method for forming layer constituted by repeated stacked layers

Patents Applicationslast 30 patents

REACTOR SYSTEM COMPRISING A TUNING CIRCUIT

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD FOR MO...

PLASMA FILM FORMING METHOD

Method For Forming Film By Plasma-Assisted Deposition Using Two-Fre...

Method for Forming Layer Constituted by Repeated Stacked Layers

Wafer-Supporting Device and Method for Producing Same