Fumito KAGAMI

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Test device, change kit, and method of exchanging change kit
- Patent number 12,106,997
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Hiroki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding mechanism, substrate mounting method, and substra...
- Patent number 11,894,256
- Issue date Feb 6, 2024
- Tokyo Electron Limited
- Toshiaki Takahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting the center of wafer and storage medium storing...
- Patent number 8,098,412
- Issue date Jan 17, 2012
- Tokyo Electron Limited
- Fumito Kagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Probe apparatus and probing method
- Patent number 7,724,007
- Issue date May 25, 2010
- Tokyo Electron Limited
- Yasuhito Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Each inspection units of a probe apparatus is provided with an imag...
- Patent number 7,701,236
- Issue date Apr 20, 2010
- Tokyo Electron Limited
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Method for re-registering an object to be aligned by re-capturing i...
- Patent number 7,583,099
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Fumito Kagami
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240178034
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Tadashi OBIKANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEST DEVICE, CHANGE KIT, AND METHOD OF EXCHANGING CHANGE KIT
- Publication number 20220172978
- Publication date Jun 2, 2022
- TOKYO ELECTRON LIMITED
- Hiroki HOSAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING MECHANISM, SUBSTRATE MOUNTING METHOD, AND SUBSTRA...
- Publication number 20220157641
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Toshiaki TAKAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROBE APPARATUS AND PROBING METHOD
- Publication number 20090085594
- Publication date Apr 2, 2009
- TOKYO ELECTRON LIMITED
- Yasuhito Yamamoto
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS
- Publication number 20080290886
- Publication date Nov 27, 2008
- TOKYO ELECTRON LIMITED
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETECTING THE CENTER OF WAFER AND STORAGE MEDIUM STORING...
- Publication number 20080068618
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Fumito KAGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR RE-REGISTERING AN OBJECT TO BE ALIGNED AND STORAGE MEDIU...
- Publication number 20080068033
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Fumito KAGAMI
- G01 - MEASURING TESTING

Fumito KAGAMI

Person

Patents Grantslast 30 patents

Test device, change kit, and method of exchanging change kit

Substrate holding mechanism, substrate mounting method, and substra...

Method for detecting the center of wafer and storage medium storing...

Probe apparatus and probing method

Each inspection units of a probe apparatus is provided with an imag...

Method for re-registering an object to be aligned by re-capturing i...

Patents Applicationslast 30 patents

PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD

TEST DEVICE, CHANGE KIT, AND METHOD OF EXCHANGING CHANGE KIT

SUBSTRATE HOLDING MECHANISM, SUBSTRATE MOUNTING METHOD, AND SUBSTRA...

PROBE APPARATUS AND PROBING METHOD

PROBE APPARATUS

METHOD FOR DETECTING THE CENTER OF WAFER AND STORAGE MEDIUM STORING...

METHOD FOR RE-REGISTERING AN OBJECT TO BE ALIGNED AND STORAGE MEDIU...