Fumitoshi Kumagai

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Power supply system
- Patent number 10,755,894
- Issue date Aug 25, 2020
- Tokyo Electron Limited
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,115,567
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply system, plasma etching apparatus, and plasma etching m...
- Patent number 9,922,802
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Taichi Hirano
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230077143
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Chishio KOSHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SUPPLY SYSTEM
- Publication number 20180226226
- Publication date Aug 9, 2018
- TOKYO ELECTRON LIMITED
- Taichi Hirano
- G05 - CONTROLLING REGULATING
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160079037
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SUPPLY SYSTEM, PLASMA ETCHING APPARATUS, AND PLASMA ETCHING M...
- Publication number 20150000842
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS