Fumitoshi Ozaki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Interlayer insulation film used for multilayer interconnect of semi...
- Patent number 7,098,129
- Issue date Aug 29, 2006
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing a semiconductor device
- Patent number 6,737,357
- Issue date May 18, 2004
- ASM Japan K.K.
- Akira Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device
- Patent number 6,645,873
- Issue date Nov 11, 2003
- ASM Japan K.K.
- Akira Shimizu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Interlayer insulation film used for multilayer interconnect of semi...
- Publication number 20040048490
- Publication date Mar 11, 2004
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for deposition of nitrogen doped silicon carbide films
- Publication number 20040018750
- Publication date Jan 29, 2004
- Auguste J.L. Sophie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing a semiconductor device
- Publication number 20030166344
- Publication date Sep 4, 2003
- Akira Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing a semiconductor device
- Publication number 20020013062
- Publication date Jan 31, 2002
- Akira Shimizu
- H01 - BASIC ELECTRIC ELEMENTS